CiS Forschungsinstitut für Mikrosensorik GmbH presents current research topics and project results in the development of silicon-based MEMS and MOEMS sensor concepts at the Hannover Messe from April 12 to 16, 2021. In the MEMS area, the focus is on pressure, force and cantilever sensors, while the MOEMS area focuses on the development of optical sensors in the spectral range from UV to mid-infrared.
In the context of HMI 2021, we will present three selected projects:
In the PassDru project, different passivation coatings are evaluated to increase the long-term stability of protective coatings on silicon-based piezoresistive sensors against body fluids or extreme pH spreads.
Palladium-coated MEMS structures similar to Si MEMS pressure sensors are the subject of investigations in the H2MEMS project and form the basis for the development of high-performance hydrogen sensors.
Thermopile sensors have seen steadily increasing market growth since the onset of the pandemic. Research work here is focused on special structuring of the silicon wafers.
Our two business unit managers will be available for further discussions at our digital booth. We look forward to seeing you – also virtually.