Novel hydrogen sensor with highest sensitivity and selectivity based on micro-electro-mechanical sensor structures
German title: | Neuartiger Wasserstoffsensor mit höchster Sensitivität und Selektivität auf der Basis von Mikro-elektro-mechanischen Sensorstrukturen | |
Acronym: | H2MEMS | |
Duration: | 1st January 2021 - 31st December 2021 | |
Description: | In connection with the feed-in of regeneratively produced hydrogen into the natural gas grid, adapted sensors are required to check the hydrogen content. H2 concentrations of up to 20% in the natural gas grid are under discussion. In recent decades, natural gas has established itself as a safe, efficient and environmentally friendly energy source for a number of industrial sectors. In the future, the chemical composition of natural gas will be subject to greater spatial and, above all, temporal fluctuations than in the past. For various production processes, however, constant and controllable operating conditions are required to a high degree in order to ensure optimum product quality and energetic efficiency with low pollutant emissions at the same time. In the subproject, the mechanical platform for a palladium-based hydrogen sensor is being developed. Palladium has the highest absorptivity of all elements for hydrogen. At room temperature, it can bind 900 times its own volume. This leads to an increase in volume, which is to be used for a basic sensory element. When a palladium layer is bonded into a passive material, the volume increases create significant mechanical stresses. The magnitude of the mechanical stresses, is a measure of the hydrogen content in the palladium. The resistance is evaluated metrologically and is in good approximation proportional to the hydrogen content in the sample gas. Program: Unternehmen Region- Die BMBF-Innovationsinitiative für die Neuen Bundesländer im Förderbereich : Wachstumskerne, WK Potenzial, ZIK; InnoProfile, Zwanzig20 | |
Funded by: | BMBF | ![]() |
Project sponsor: | Euronorm | |
Funding code: | 03ZZ0757B | |
News articles about H2MEMS: | ||
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GREAT H2 final conference and green hydrogen in the industry 21. November 2023 |
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Member of the European Parliament visits the stand of CiS Research Institute 17. April 2023 |
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Redundant temperature measurement and high-precision, piezoresistive angular rate sensors at Hannover Messe 2023 12. April 2023 |
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CiS Research Institute exhibits at the Thuringian Mobility Forum in Ilmenau 14. September 2022 |
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Innovative sensor technology for concentration measurement of gases and hydrogen at Hannover Messe 2022 2. June 2022 |
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CiS Research Institute at Hannover Messe 2022 24. May 2022 |
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InnoCON Thuringia 2021 also starts online in 2021 30. November 2021 |
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Exhibition booth at HM21 Digital Edition 12. April 2021 |
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H2MEMS – Novel hydrogen sensor with highest sensitivity and selectivity based on silicon-based MEMS sensor structures 12. March 2021 |
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