At the world’s leading industrial trade fair in Hannover, from April 17 to 21, 2023, the CiS Research Institute will present its portfolio at the joint stand of LEG Thüringen, Hall 3, Stand 26. The spectrum includes silicon-based MEMS and MOEMS sensor concepts for applications in the automotive industry to the development of a hydrogen economy. A large number of mechanical and optical sensors are required for this purpose in order to record all the necessary measured variables.
Redundant temperature measurement for the operational reliability of sensor systems
For the first time the CiS Research Institute presents results of the research project “Redundancy”. This makes it possible to develop and manufacture customer-specific redundant temperature sensors based on Si-temperature diodes and platinum resistance elements.
Redundant systems are designed to significantly increase the operational reliability of a sensor system. When using two sensors that differ significantly in terms of their characteristics, simultaneous data readout and comparison during operation can determine whether a component has failed. When using three sensors, if one component fails, the correct measured value can still be generated by using the two subcomponents that are still intact. The redundancy considerably improves the reliability compared to single sensors, which opens up previously closed fields of application in industrial measurement technology or automotive.
The Si-temperature diodes used have a maximum deviation of ±0.5°C in the industrially relevant temperature range of -40 C to +140 C with respect to a common characteristic curve. The specially manufactured PT1000 correspond to quality class A.
The research and development work described was funded in the research project “Redundancy – Redundant Temperature Measurement up to 300°C” by the Federal Ministry of Economic Affairs and Climate Action (BMWK).
Funding code: 49MF200075
High-precision, piezoresistive angular rate sensors for autonomous offline navigation
Another innovation is a high-precision, piezoresistive angular rate sensor for autonomous offline navigation to determine the exact position of moving objects in 3-dimensional space. This piezoresistive MEMS sensor has a wide range of applications – in automotive engineering, offline navigation, airbag sensors, stabilization of video cameras, 3-D mouse and position sensors for navigation devices are just a few of the applications that have come to the forefront of developments. In the field of navigation and guidance systems, the highest requirements have to be met, which have been implemented in the Gyros project. First development results are presented.
The research and development work described was funded by the German Federal Ministry of Economic Affairs and Climate Action (BMWK) in the research project “High-precision piezoresistive angular rate sensor for autonomous offline navigation (gyros)”.
Funding code: 49MF190084
Palladium-coated MEMS structures
For the use of green hydrogen, specific sensors are required to measure the hydrogen content in the natural gas network. For this purpose, the Cis Research Institute, together with two other partners, is developing palladium-coated MEMS structures that are very similar to Si-MEMS pressure sensors. Palladium can absorb 900 times its own volume of hydrogen at room temperature. The mechanical stresses generated by this volume increase, can be detected using a highly sensitive piezoresistive sensing bridge and provide a measure of the hydrogen content in the palladium.
The project on which this article is based was funded by the German Federal Ministry of Education and Research under grant number 03ZZ0757B.
Micro-Opto-Electric Sensors and their Applications
The MOEMS division focuses on the development and production of IR emitters and thermopile sensors whose active zone is spanned within a very thin membrane. Here, a versatile technology platform enables individual developments of gas sensors and temperature measurement devices for industrial partners. These silicon microsensor technologies are flanked by innovative solutions for their assembly and housing for compact, miniaturized and specialized assemblies.
Among the products on display at the booth will be sensors for detecting the angle of incidence of light, as known from tracking systems of photovoltaic systems, to increase energy efficiency. For this purpose, the ultra-flat sensor module with the 4-quadrant photodiode is integrated in a window pane and precisely detects the direction of incidence of daylight for controlling facade-integrated shading systems. Other applications are possible for beam guidance in laser technology, the control of smart displays or automotive safety.
The described research and development work was funded in the research project “RISEQ – Direction sensitive quadrant detector, (FKZ: MF130154), as well as in the research project “LightControl” (FKZ: ZF4001704GM9, ZIM) by the Federal Ministry of Economic Affairs and Climate Action (BMWK).
Thuringian research institutes at the HMI 23
In addition, the CiS Research Institute is also represented at the booth of the Research and Technology Association Thuringia (FTVT e.V.), in hall 2, booth C 57. Here the CiS Forschungsinstitut für Mikrosensorik presents a highly stable, media resistant barometric pressure sensor, which was manufactured in MEMS technology. It will show “WLP – Wafer-Level-Packaging” based piezoresistive bulk micromechanical pressure sensors using silicon direct bond interconnects and vias with increased chemical resistance as well as improved contact and long-term stability, suitable for medical applications.