PassDru – CiS

Congress contribution on passivation options for MEMS sensors at the ACHEMA in Frankfurt

22. August 2022/in Events, MEMS

In her congress contribution at ACHEMA, Dr. Heike Wünscher from the MEMS department at the Cis Research Institute, presents research results for the passivation of silicon-based MEMS sensors and their use as flow sensors in harsh environments

Exhibition booth at HM21 Digital Edition

12. April 2021/in Events, Force, MEMS, MOEMS, Pressure, UV

This week at HM21 Digital Edition, we present current research topics and project results in the development of silicon-based MEMS and MOEMS sensor concepts

Long-term stable passivation of piezoresistive sensors for demanding sensor environments

11. January 2021/in MEMS, Pressure

Direct contact with the medium is difficult to implement for silicon-based microsensors. In order to fully exploit miniaturisation, corrosion protection is applied at chip level. This makes an application in more demanding environments possible even without additional protective constructions

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