Experts from research and industry met in Erfurt on 17th September 2025, to discuss current topics and innovations in silicon-based MEMS technology. Following the presentation and introduction by Prof. Thomas Ortlepp, Managing Director of the CiS Research Institute, Prof. Klaus-Stefan Drese from Coburg University opened his keynote speech with the question: Is sensor technology a trend? A central aspect here was the growing importance of sensor technology in a digital information society in the context of AI-based decision-making processes. For SMEs, this opens up new opportunities with specialization in niche markets. In addition, sustainable materials and environmentally friendly chemicals are becoming increasingly important.
In the first session, “Design and Simulation,” department head Geert Brokmann (CiS Research Institute) gave an overview of modern simulation tools for MEMS sensor development. One focus was on modeling various physical effects. Konstanze Olschewski (Alpha Analytics) then explained innovative approaches to analyzing complex sensor data using AI.
Session two focused on topics related to process technologies and measurement technology. Dr. Heike Wünscher from our company explained two different measurement principles for determining the NH3 content in NH3 crackers. Dr. Thomas Frank, Head of the MEMS Department (CiS Research Institute), provided comprehensive information on silicon-based strain gauges as a universal measuring medium for pressure and force measurements.
The third session focused on applications and markets. Dr. Philip Schmitt (Ruhr University Bochum) presented a new measurement and sensor concept that does not require any auxiliary electrical energy for measurement, storage, or digitization. Alexander Will (WIKA) and Dr. Olaf Skerl (BIOTRONIK) demonstrated applications of high-accuracy and high-precision pressure sensors in the process industry and in medical technology.
The exciting contributions from industry and science provided plenty of inspiration for intensive discussions during the breaks and new contacts. The workshop once again confirmed the importance of MEMS technologies for future industrial developments and showcased specific applications.
The workshop was moderated and organized by CiS e.V.
