fltr: Kristian Kirsch (VACOM), Dr. Klaus Bergner (VACOM), Dr. Mario Bähr (CiS Forschungsinstitut)
VACOM Vakuum Komponenten & Messtechnik GmbH, based in Großlöbichau near Jena, has been awarded the Thuringia Innovation Prize 2025 in the “Industry & Materials” category. The company impressed the jury with its newly developed miniaturized vacuum sensor CASSINI, which sets new standards in precision, efficiency, and integration capability.
The CASSINI sensor combines sophisticated microsystem technology with state-of-the-art measurement technology. Its compact design opens up new applications in semiconductor manufacturing, aerospace technology, and analysis and coating technology.
The scientific and technological basis for the microelectromechanical system (MEMS) was laid in joint research projects with the CiS Forschungsinstitut für Mikrosensorik GmbH. This cooperation thus combines VACOM’s industrial specifications with the scientific expertise of the CiS Research Institute in sensor development. With CASSINI, VACOM has developed a product that impressively underscores the close connection between research and industrial application Made in Thuringia.
Info about VACOM:
VACOM develops and manufactures high-precision components and measurement technology for vacuum applications. These components are used in research and industrial high-tech processes. VACOM’s customers include companies from the chip industry, aerospace, medical technology, and analysis technology. What do all customers have in common? They require perfect component cleanliness for their sophisticated cutting-edge technology.
