News

MOEMS Workshop on NDIR sensor technology successful in 2nd edition

Yesterday, the workshop autum at CiS was continued in an exciting way with the workshop on "Components of NDIR sensor technology" which is already in its second edition. Designed as a hybrid presence and online event, more than 40 experts from research and industry discussed specific infrared sensor development for the analysis of liquid and gaseous substances [learn more]


Disinfection with short-wave LED light in the UVC or blue wavelength range

Based on innovative assembly and interconnection technologies, CiS is responsible for the development of assembly processes for UV LEDs within the consortium "Advanced UV for Life". Combined with the know-how of other partners in the consortium, solutions for disinfection with UV-LEDs are realised [learn more]


CiS Workshop Trilogy started

With the Workshop on Quantum Technologies the exciting workshop autumn CiS began. The two-day hybrid event offered current research results from the fields of quantum sensor technology, quantum communication and computing as well as enabling technologies. Workshops on NDIR sensor technology and pressure sensor technology will follow every two weeks [learn more]


CiS team wins a tree by bicycling

Also this year, a committed team of the CiS Forschungsinstitut participated in the "City Cycling" campaign. The aim of the competition is to cover as many everyday distances as possible by bicycle in a climate-friendly way. From September 10 to 30, the 13-member team covered more than 1,500 kilometers by bicycle and thus won a tree [learn more]


Cooperation with Ilmsens GmbH - Technology competition getstarted2gether

After a successful pitch in yesterday's technology competition getstarted2gether, Hans-Christian Fritsch, Managing Director of Ilmsens GmbH, and Thomas Brock, Managing Director of the CiS Forschungsinstitut, today signed a letter of intent to further develop the founding project "Ultra-wideband microwave sensor technology [learn more]


5th Industry Innovation Dialogue

The 5th Industrial Innovation Dialogue highlights current research competencies of quantum technologies for the Thuringian economy. Mario Bähr from the CiS Forschungsinstitut will present diamonds as a cost-efficient quantum material and report on results from the research project DiaQuantFab [learn more]


8th GMM Workshop Micro-Nano-Integration 2020

In the context of the 8th GMM Workshop Micro-Nano-Integration 2020 the CiS Forschungsinstitut will be represented with two exciting short lectures. The online conference is organized by the VDE/VDI Society for Microelectronics, Microsystems and Precision Engineering in cooperation with Ruhr-University Bochum [learn more]


SiCer technology discussion of the BMBF growth core HIPS - High Performance Sensor Technology

Thuringia's industrial companies and research institutes are working together in the HIPS growth core to develop new high-performance sensors based on the already patented SiCer technology and to market them jointly in the future. SiCer technology stands for a unique combination of silicon technology (Si) with ceramic multilayer technology (Cer) [learn more]


Construction of complex miniaturized force sensor systems joined using glass solder

The CiS Forschungsinstitut uses its own piezoresistive, miniaturised silicon strain sensors (Si-DMS) with an integrated full bridge for hybrid force sensors. Glass solder bonding is used to join the Si strain gauges on the spring body at 90° to each other [learn more]


Online seminar successful - Further topics planned

Our online seminar on the topic "In-the-ear sensor for vital monitoring" yesterday morning was a complete success. The speakers Dr. Martin Schädel, business unit manager MOEMS and Dr. Martin Jahn, project manager in the MOEMS department, presented an optical sensor which - integrated in an earmould - can evaluate blood pressure changes of each individual heartbeat [learn more]


Silicon Science Award presented

Our employee Dr. Robert Täschner was awarded the Silicon Science Award for his dissertation "Process and sensor development for production-ready silicon-based pressure sensor systems suitable for high temperatures". The CiS e.V. awards this prize for outstanding scientific achievements in the field of microsystems technology [learn more]


Miniaturized InfraRed Emitter Chip (MIREC)

With a new plasma-assisted etching process, a thin functional membrane and a break trench are simultaneously created for the following chip separation. In MEMS IR emitters, this results in more than a factor of 4 smaller areas and a dynamic range that is 2 times higher than that of the current state of the art [learn more]


Better safe than sorry - flange seal monitoring

Permanently safe flanged joints are the basic requirements for stable production processes and work at a high safety level. Recently developed silicon-based MEMS sensors are applied to bolt heads and measure their deformation due to changes in the preload force [learn more]


Sensitive fluorescence sensors in cube sugar format

Sensitive fluorescence sensors in lump sugar format - Modern fluorescence sensors should be small, high-resolution and highly sensitive, inexpensive and robust. In the SmartFLU research project, the CiS Forschungsinstitut is developing a technological construction kit for a 2-channel fluorimeter [learn more]


MEMS sensors for green hydrogen

For the implementation of the National Hydrogen Strategy, the CiS Forschungsinstitut is partner in two research projects. The HYPOS consortium develops solutions for the entire value chain and broad application of green hydrogen in many industries [learn more]


Innovation Network QPhot

The CiS Forschungsinstitut joins the innovation network QPhot - Quantum Photonics to reach the emerging market of quantum photonics and to establish customized, marketable sensor solutions in this segment [learn more]


High measurement accuracy for the optical characterization of UV LEDs

By optimizing the measurement setup and the evaluation routine, an absolute comparison of the radiation characteristics of different measurements with each other is possible. Less than 3% measurement uncertainty is achieved with an angular resolution of 1.5. The standardization procedure is currently being tested [learn more]


GeWaDiS - Targeted growth of synthetic diamond layers for pressure sensors

Passivation layers of synthetic diamond are particularly resistant to media. A cost-effective implementation of diamond coatings in relevant sensor areas has been reliably tested by adapting microsystem technologies [learn more]


Development of a sensor for early fault detection in high-performance batteries

After a successful pitch at getstarted2gether, the founding project "Early Fault Detection in High-Performance Batteries" of DC Industrie Entwicklung GmbH is currently being further developed to production and process maturity. The CiS Research Institute supports the start-up during the funding period with its technical infrastructure as well as its competence in silicone from more than 25 years [learn more]


The CiS workshops 2020

Three interesting workshops on current research trends will take place in autumn 2020 and will deal with topics such as pressure sensor technology, NDIR sensor technology and quantum technologies applied for the first time. The workshops are aimed at interested parties from science, politics and business and serve to exchange ideas with experts from industry and research [learn more]


Thermopiles for non-contact temperature measurement at humans

The current situation around Corona and the COVID-19 pandemic requires very dynamic action and above-average commitment. Within the scope of industrial orders the CiS Forschungsinstitut develops and manufactures thermopiles together with partners. These sensors allow non-contact temperature measurement and are used in contactless thermometers in gate solutions [learn more]


1st Status Workshop of the BMBF Growth Core HIPS - High Performance Sensor Technology

Within this 1st status workshop on the BMBF growth core HIPS on March 19, Andrea Cyriax will present current developments in the field of MEMS sensor technology. In a second presentation, Dr. Klaus Ettrich will introduce the joint project on gas sensor technology, which is coordinated by the CiS Research Institute [learn more]


Special prize for „Hello Madam“

The submitted SEM image with this joking paraphrase shows the rearrangement of Si microstructures at 1150°C in a hydrogen atmosphere. This submission from the CiS Forschungsinstitut was awarded a special prize in the "NanObjectives 2.0" photo competition [learn more]


Parliamentary evening of the VIU e.V.

Yesterday evening, the CiS Forschungsinstitut participated in a Parliamentary Evening of the Verband Innovativer Unternehmen e.V. at the German Parliamentary Society in Berlin. In his lecture Dr. Martin Schädel presented research results on an optical in-ear sensor for monitoring important vital parameters [learn more]


HotSens - temperature diodes for the high temperature range with one-point calibration

In the chemical industry, for example in the production of battery cells, precise temperature measurement is required. Within the HotSens project, the CiS Forschungsinstitut succeeded in producing temperature diodes for the high temperature range up to a maximum of 300°C with a maximum of a one-point calibration [learn more]


W3 Fair+Convention 2020 in Wetzlar on 26 and 27 February 2020

CiS presents the latest developments in optics and photonics on the special exhibition area "Microtechnologies for Optical Devices" designed by the IVAM Microtechnology Association daily from 9:30 to 17:00 [learn more]


15th Workshop on Advanced Silicon Radiation Detectors in Wien

On Wednesday, February 19, CiS will present on the topic "Simulation and Technology Study of Shallow Doping Profiles" at the 15th "Workshop on Advanced Silicon Radiation Detectors"  [learn more]


CiS at the SPIE Photonics West 2020 in San Francisco

With the repeated participation in the SPIE Photonics West 2020 in San Francisco, the world's largest annual event for photonics, laser and biomedical optics, CiS was able to demonstrate its expertise in the design, manufacture and assembly of customer-specific optical microsensors on an international level [learn more]


Thuringian start-up competition „getstarted2gether“

On 30.01.2020, thirteen selected start-up teams presented themselves to the jury of members of the business-related research institutes of the FTVT [learn more]


Quantum technology helps to cure cancer

Currently, interdisciplinary experts at the University of Berkeley are discussing novel imaging methods using coupled light quanta. CiS develops and manufactures optical components for this type of quantum imaging [learn more]


First successful data transmission - milestone in quantum communication

Researchers from three continents are celebrating the first successful data transmission between a quantum flux parameter and a nanocryotron in Yokohama today. The research result is a joint success of the CiS Forschungsinstitut in Erfurt, the Yokohama State University in Japan and the Massachusetts Institute of Technology in Cambridge, USA. [learn more]


Final spurt for 2nd edition of the technology competition "GetStarted2gether"

The application period for the second edition of the technology competition "GetStarted2gether" already started on 1 December 2019. Potential applications can still be submitted by e-mail until 13 January 2020 [learn more]


Announcement of the winners of the Silicon Science Award 2019

Together with the CiS Forschungsinstitut, CiS e.V. regularly presents the Silicon Science Award for outstanding scientific achievements in the field of microsystems technology. The founders provide a total of 4,000 euros in prize money, which this year's three prize winners can look forward to [learn more]


Technology and knowledge transfer in Ilmenau

As part of the Transfer Day 2019 of the TU Ilmenau, the CiS Forschungsinstitut was represented last week with two contributions [lean more]


CiS Forschungsinstitut at academix

As one of the Thuringian business-related research institutes and as an affiliated institute of the TU Ilmenau, the CiS Forschungsinstitut presents itself today for the first time at the academix Thüringen company contact fair in the CongressCenter, Messe Erfurt [learn more]


CiS Forschungsinstitut für Mikrosensorik GmbH at Compamed 2019

Within the framework of Compamed in Düsseldorf, which starts today, the Thuringian research institution, founded in 1993, will present current research results. The development of silicon-based microsensor elements for applications in industry, medicine and the environment has been a core competence of the CiS Forschungsinstitut for many years [lean more]


CiS Forschungsinstitut successful at the InnoCON Thuringia 2019

The InnoCON is a platform that presents successful projects and invites networking. The CiS Forschungsinstitut presented technological challenges of the project "TeSIS - Textured Blackbody MEMS IR Emitter" and presented itself at the joint stand of the FTVT [learn more]


Long Night of Science at the CiS Forschungsinstitut - See, marvel and experiment

The CiS Forschungsinstitut für Mikrosensorik, located in the southeast of the city of Erfurt, is participating in the Erfurt Long Night of Sciences for the seventh time. On 8th November 2019, engineers and scientists will present their research results and applications to interested visitors [learn more]


Microsensors for measuring the preload force

At the CiS Forschungsinstitut, silicon-based MEMS sensors are being developed for testing safety-relevant bolted connections. Such special bolts can be used for example in mechanical engineering, materials handling and wind power plants [lean more]


Cu-Pillars as the basis for 3D integration

As base metallization, copper offers a wide range of metallization possibilities which are necessary for process optimization of the thermocompression process [learn more]


Exciting presentations at the elmug4future conference

This year's technology conference "elmug4future" is dedicated to the main topics "Condition, Health and Quality Monitoring - Sensors, Methods and Applications". In the comcenter Brühl Erfurt, the CiS Forschungsinstitut will be represented with exciting presentations on current development results [learn more]


Quantum based magnetic field sensor technology

Scientists at the CiS Forschungsinstitut are developing compact industrial quantum sensors with a tiny diamond at their core. These synthetic diamonds with a manipulated atom in the crystal lattice allow the high-precision measurement of magnetic fields [learn more]


Physics Summer at TU Ilmenau

From 16 to 20 September 2019, the Physics Summer of the Technical University of Ilmenau will be held under the motto "Physics of the Earth". CiS as an affiliated institute supports these MINT activities with two lectures and supports the event together with CiS e.V. with a sponsoring [learn more]


MOEMS Workshop 2019 - Components for NDIR gas sensors

On November 5, 2019 the MOEMS Workshop "Components for NDIR gas sensor technology" starts. In three exciting sessions special requirements and innovative solutions for NDIR gas sensors, miniaturized IR light sources and detectors will be discussed [Registration and flyer]


CiS Forschungsinstitut at Sensor China 2019, Shanghai

CiS will be represented at Sensor China 2019, Shanghai (2nd-4th September 2019) as an exhibitor at the LEG Thüringen joint stand [learn more]


Successful start of winning projects

On August 8, 2019 in Bad Langensalza, Wolfgang Tiefensee, Thuringia's Minister of Economic Affairs, presented the award notices to the winners of the first technology competition "GetStarted2gether"[learn more]


Pressure sensor made of <110> silicon with increased linearity

The new research project "Pressure sensor made of <110> silicon with increased linearity" promises a significant reduction of calibration effort, potential sources of error and costs for high-precision pressure sensing elements [learn more]


CiS at MikroSystemTechnik Kongress in Berlin

From 28 to 30 October 2019, employees of the CiS Forschungsinstitut will present the latest development results on optical microsystems, packaging and measuring technology in three of the sessions on offer [learn more]


Silicon-based microsensors for industrial, medical and environmental applications

At Sensor+Test 2019, the CiS Forschungsinstitute will present current developments and research results from the MEMS, MOEMS and silicon detectors business units for applications in industry, medical and environmental technology [learn more]


Chinese-German Meeting of the Sensor Technology Industry on 21.06.2019

The Chinese Association of the Sensor and IoT Industry (SIA) is planning a visit to Germany on 21.06.2019 with a delegation from the sensor and IoT industry, R&D institutions, IoT associations and local IoT industrial parks [learn more]


CiS Forschungsinstitut hosts first getstarted2gether technology competition

On 28.05.2019, nine start-up teams from Thuringia presented themselves to a jury made up of members of the FTVT's business-related research institutes [learn more]


In the project "DiaQuantFab" standards for the quantum material diamond are developed

The BMBF joint project DiaQuantFab started on 15.5.2019. Within three years, the project partners will develop commercially viable microsensor systems for high-precision magnetic field measurement and calibration-free current measurement based on NV centres in diamond [learn more]


German-Chinese MEMS Smart Sensor Institute at the VivaTech in Paris

The Jiangning Development Zone presents 5 start-ups at Viva Technology in Paris from May 16-18, 2019, bringing together promising start-ups and the world's leading technology companies from a variety of industries and offering opportunities for collaboration and networking [learn more]


Long Night of Technology in Ilmenau - exciting experiments on 11 May 2019

Also in 2019, the CiS Research Institute will be present at the Long Night of Technology at the Technical University of Ilmenau with exciting experiments for young and old [learn more]


Workshop "Customized MEMS sensors for applications in science, industry4.0, automotive and mobility" on 21.05.2019 in Erfurt

The workshop "Tailor-made MEMS sensors for applications in science, industry 4.0, automotive and mobility" presents trends and current results from research, development and application for silicon-based MEMS sensors [learn more]


Delegation of Arab Ambassadors visits CiS Forschungsinstitut

On the initiative of the German-Arab Friendship Society, a group of Arab ambassadors visited CiS Forschungsinstitut on April 1, 2019 [lean more]


Micro strain sensors for monitoring the mechanical load of machines and machine elements

Dr. Thomas Frank, head of the MEMS department at the CiS Forschungsinstitut, explains miniaturized silicon strain sensors, 50 times more sensitive than a conventional metallic foil strain gauge and as small as the head of a pin, on April 4 at 15:00 [learn more]


EAS 2020 Workshop "Energy self-sufficient sensor systems"

At the beginning of last week, Expert Committee 4.3 Sensor and Sensor Systems of the VDE/VDI Society for Microelectronics, Microsystems and Precision Engineering (GMM) met at our company to prepare the next conference "Energy Self-sufficient Sensor Systems" (EAS2020) to be held in spring 2020 [learn more]


Silicon-based microsensors and their applications - double pack at HMI 2019

At HMI 2019, CiS will be presenting sophisticated AVT for time-of-flight camera modules, double-sided microstrip detectors and other current development results in a double pack at the Thuringia joint LEG stand in Hall 4, Stand F34 and at the stand of Forschungs- und Technologieverbund Thüringen e.V. (FTVT) in Hall 2, Booth A27 [learn more]


Appointment to the Thuringian State Science Conference

The Thuringian Minister of Economics Wolfgang Tiefensee appoints Prof. Thomas Ortlepp as a new member of the Thuringian State Science Conference for a period of 4 years. As an interface between science, politics, education as well as business and society, this platform promotes exchange and dialogue on current and strategic issues of Thuringia's economic and science policy [learn more]


VIPO joint project starts

The "VIPO growth core", a joint research project funded by the German government with seven million euros, is currently being launched. VIPO stands for virtual product and process optimization. The aim is to capture virtual production through simulation. The CiS Research Institute is one of the three participating science partners [learn more]


IDE sensor with diamond passivation at Thüringer Werkstofftag 2019

Impedance sensors are used for the analysis of e.g. air humidity, liquid levels or chemical/biological data. The sensors are used for the analysis of air humidity, liquid levels or chemical/biological parameters and are composed of interdigital electrodes (IDE). CiS will present the first results on the long-term stability of IDE sensors with diamond passivation in various aggressive media on 07.03.19 at the TU Ilmenau [learn more]


Temperature sensors for industry 4.0

The measurement and control of temperatures is one of the most common applications for sensors and is becoming increasingly important due to the requirements of industry 4.0 applications, e.g. in plant and process control. Recently, an important milestone was reached in a development project for high-temperature diodes [learn more]


CiS at the SPIE Photonics West in San Francisco

The SPIE Photonics West in San Francisco, the world's largest event for photonic technologies, will start on Saturday with three conferences and two trade fairs [learn more]