Project: Innovation through Cooperation in the Field of Semiconductor Technologies (INKO)
Project No.: 2021 WIN 0028
For an economic implementation of sensor technologies on research level, industrial facilities are needed, which allow an implementation of latest research results and ensure standardized process flows with constant and reproducible quality. With the support of the state of Thuringia, the CiS Research Institute is able to invest in a modern LPCVD system (LPCVD – Low Pressure Chemical Vapor Deposition). With the new system, the CiS Research Institute underlines its bridging function as a partner in the transfer of basic research results into applicable technologies for industry, especially for Thuringian SMEs and their cooperation partners in the field of sensor technology.
The introduction of this technology allows the deposition of extremely thin and very homogeneous layers. The use of new technical gases and optimized gas distribution will enable new innovative technology options in the field of layer development. Thus, the CiS Research Institute increases its innovative power to develop new sensors in the fields of MEMS and MOEMs together with Thuringian SMEs. In this way, future-oriented solution proposals for industrial automation, energy technology, medical measurement technology and safety technology can be quickly transferred to market maturity.
The project “Innovation through Cooperation in the Field of Semiconductor Technologies (INKO)” is funded by the Free State of Thuringia or the Thuringian Ministry of Economics, Science and Digital Society (TMWWDG) with state funds under the number 2021 WIN 0028 and is assigned to one of the five focal points of the Thuringian innovation strategy.