Project: Innovative high-temperature technology – resource-saving, energy-efficient and low-emission
With the current challenges of progressive climate change, there is an increasing demand for sensors that either serve temperature and gas sensing or regulate the efficient use of energy and raw materials via intelligent measurement and control systems, or even operate in a fundamentally energy-efficient manner themselves. Together with partners from industry and research, the CiS Research Institute is engaged in the field of sensor technology, in the classical MEMS and MOEMS areas, as well as in the field of quantum technologies and for the use of green hydrogen as a valuable energy carrier for energy-intensive processes in industry. For this purpose, sensors that can be used for the electrolysis of water, storage and leakage detection of green hydrogen in the various plants are needed. The production of these sensors largely requires energy-intensive processes within the value chain from the starting material silicon to the finished sensor.
In order to improve energy efficiency here, the CiS Research Institute is investing in a modern, latest-generation high-temperature plant with support from the state of Thuringia and co-financing from funds from the European Union for Regional Development (ERDF) and REACT-EU. It offers various possibilities for flexible use in layer production on large-area substrates while reducing energy consumption. A fully automatic wafer handling system completes this plant.
It also features an interface for computer-aided process parameter acquisition and control. Combined with the possibility of remote monitoring, the further digitalization of process control within the CiS Research Institute is advanced.
The investment in this modern high-temperature plant with resource-saving process control strengthens the economic viability of the CiS Research Institute in the long term and thus supports partners from industry and research.
The project belongs to the specialization field Sustainable Energy and Resource Utilization of RIS3 Thuringia. It contributes to the preparation of a green, digital and stable recovery of the economy, including research and development that contributes to this goal or to a strengthening of the health care system.