Project: Sensor Development – Future-Oriented and Production-Oriented (ZuSe)
As a development partner for SMEs, we prioritize compact, robust, and reliable sensor designs for opto-electrical and electro-mechanical measurement principles that meet the highest possible sustainability standards in both manufacturing and end-use applications. This requires investments in various technological steps of sensor manufacturing. In this context, current challenges—including economic, energy-efficient, and resource-efficient aspects—are holistically considered and addressed as early as the development process.
The modernization effort focuses on specialized bonding technologies for new complex 3D structures, dry etching processes, and sawing processes under production-like conditions. A key aspect of procuring the new equipment is its digitalization capability. Relevant measurement values and parameters are recorded in a central database during the processes. This enables continuous process monitoring and lays the groundwork for increasingly automated implementation.
The research and development work described was supported by the Federal Ministry for Economic Affairs and Energy (BMWE) – funded by the federal government’s “Infrastructure and Climate Neutrality” special fund.
