Project: Use of TiN coatings to improve the sensitivity of thermopiles for application in the R&D funding program (InnoPrepare, MOEMS)
Project No.: 2023 IIP 0014
Gas concentrations are determined in many fields of application such as environmental and process measurement technology, hazard detection, building automation or medical technology. Various measurement methods can be used to detect them. One purely optical and non-contact method is non-dispersive infrared (NDIR) spectroscopy. Here, the gas to be analyzed is fed into a measuring cuvette and irradiated with light in the infrared spectral range. At specific wavelengths, the gases to be examined exhibit concentration-dependent absorption, which is recorded by an IR detector. For the NDIR gas system, the IR emitters, which generate the IR light, and IR detectors are the decisive components. IR detectors are usually MEMS thermopiles, which transfer the temperature differences within the component generated by incident IR light into an electrically measurable thermoelectric voltage. Thermopiles have special layers or layer structures that affect light absorption and thus influence performance. The CiS Research Institute would like to investigate the effect of an additional TiN layer on the absorber surface of thermopiles. This technological approach is to be implemented through to series production. To this end, a stable and reproducible process must be demonstrated and a suitable process measurement technique developed.
In preparation for a ZIM_cooperation project, the following tasks were awarded to 5microns GmbH as a service in accordance with ThürVgG:
- Development of a defined task
- Recruitment of cooperation partners
- Research and market analysis
The scope of the service amounts to € 48,600.00 in the performance period from 01.11.2023 to 30.06.2024.
The grant is earmarked for preparatory activities for the joint R&D project with the topic “Use of TiN coatings to improve the sensitivity of thermopiles for application in the R&D funding program “Central Innovation Program for SMEs (ZIM)”.
The project belongs to the specialization field “Industrial Production and Systems” of the Regional Innovation Strategy for Intelligent Specialization and Economic Change in Thuringia (RIS Thuringia).
The project, which was funded by the Free State of Thuringia, was supported by funds from the European Union as part of the European Regional Development Fund (ERDF).
