Flow sensors are required wherever fluids are characterized, controlled, transported or influenced. They can be found in many industrial sectors such as process measurement technology, medical technology, aerospace, oil and natural gas measurement, food technology, etc. Important fluids such as hydrogen (as one of the energy sources of the future), carbon dioxide (e.g. for beverage production and refrigeration) as well as air and water flows in heating, ventilation and air conditioning in buildings are monitored using these sensors.
The aim is to develop a cost-effective packaging technology for microcalorimetric membrane-based flow sensor chips for measuring flowing gases and air both in one dimension (1D), e.g. in pipelines, and in two dimensions. The decisive parameter here is the flow velocity. The volume flow is then derived from the velocity. The focus is on the reliable determination of very low flow velocities.
The option of simple and cost-effective packaging means that the system can be set up with different flow channels. Various mounting options with application-specific carrier boards, flow channels, housings and connections for optimum sensor positioning are being investigated. The silicon-based calorimetric flow sensor should guarantee a fast response and be easy to modify for many applications.
For use in gas pipelines and HVAC systems, there are high safety requirements – such as explosion protection – for the sensor solution.
The research project will create the basic knowledge required to develop a cost-effective, non-invasive and highly scalable multidimensional flow sensor platform.
The research and development work described is funded by the Federal Ministry of Economic Affairs and Climate Action (BMWK) in the research project “Packaging Technology for Thermal Flow Sensors” (Pack-Flu).
Funding code: 49MF 230039
