The 24th Precision Fair will take place on 12th and 13th November 2025, at the Brabanthallen in ‘s-Hertogenbosch. The CiS Research Institute for Microsensor Technology will be exhibiting for the first time at the joint stand of LEG -Thuringia in hall 6, booth 202. Dr. Martin Schädel and Dr. Klaus Ettrich, business unit managers for MOEMS and MEMS, will be presenting a selection from the institute’s extensive research and development portfolio. As specialists with more than 30 years of experience, we develop customer-specific silicon-based sensor elements for mechanical and optical variables through monolithic integration of sensor functions. Our expertise lies primarily in double-sided and three-dimensional microstructuring and the deposition of functional layers on silicon. Learn more about our competencies and potential for your success. We look forward to your visit. Our highlights:
Improvement of the stability of hybrid silicon strain sensors (SiDMeses)
By minimizing mounting stresses and achieving high overload resistance, hybrid silicon strain sensors offer improved stability. These sensors enable highly accurate measurements in a wide range of applications, from automation technology to the hydrogen economy.
» Infosheet: Hybrid silicon strain sensors (SiDMeses)
Pressure sensor for ultra-high pressure applications (DSNemo)
Traditionally, pressure sensors use a bending plate to increase sensitivity. For ultra-high pressure applications, a bending plate is not necessary and the design is significantly reduced in size. The new technology platform offers many possibilities, including a front plate with a diameter of 1 mm, a pressure range up to approx. 20,000 bar, a measuring range of > 20 mV/V, and a maximum operating temperature of 200 °C.
» Infosheet: Pressure sensor for ultra-high pressure applications (DSNemo)
Galvanically isolated incremental sensor (GalGIS)
The galvanic incremental sensor can be used in optical encoders for position and speed sensors—especially where high technical safety is required—for example, in aerospace, rail transport, and medical technology.
This project result will also be on display in the Hall of Fame in the entrance area and demonstrated at booth H6-202.
» Infosheet: Galvanically isolated incremental sensor (GalGIS)
Fast infrared emitter array (FIRE)
Infrared emitters with a dynamic range greater than 100 Hz are another new development from the CiS Research Institute. The nimble infrared emitter array is suitable for applications in non-dispersive infrared spectroscopy (NDIR) for gas detection and concentration in medical and industrial applications.
» Infosheet Fast infrared emitter array (FIRE)
This leading international trade fair in the Netherlands is one of Europe’s most important platforms for more than 400 companies and research institutions from 21 countries along the entire value chain in the field of high and ultra-high precision technology. This year, the focus is on six key topics: mechatronics and systems, measurement technology, vacuum and cleanroom technology, microprocessing and motion technology, lasers and photonics, and manufacturing for maximum precision.
The following research and development work was funded by the Federal Ministry for Economic Affairs and Energy:
Improvement of the stability of hybrid silicon strain sensors (SiDMeses) – FKZ 49MF200061
Pressure sensor for ultra-high pressure applications (DSNemo) – FKZ 49MF220036
Galvanically isolated incremental sensor (GalGIS) – FKZ: 49VF123456
Fast infrared emitter array (FIRE) – FKZ: 49MF220020
