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MEMS design for highly stable and high-precision pressure sensors – CiS Forschungsinstitut für Mikrosensorik cooperates with TU Hamburg-Harburg

You are here: Home1 »  News2 »  MEMS design for highly stable and high-precision pressure sensors –...
17. June 2016

Researchers and developers from both institutions are working together on a project to achieve greater reliability in the development and production of application-specific piezoresistive pressure sensors with a multi-physical simulation.

Deviations between simulated and actually measured characteristic curves occur time and again. These are possibly caused by various physical influencing factors that are only insufficiently represented in previous simulation programs.

A highly stable adaptive FEM solver developed at the TU Hamburg-Harburg allows new simulations between mechanics, temperature and semiconductor electronics to be coupled with a reasonable amount of effort and leads us to expect improved agreement between simulation and actual measurement results.

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