Micro-Electro-Mechanical Systems are part of many everyday products. They are usually made of silicon and form the basis of innovative solutions in electronics. The areas of application are wide-ranging and extend from sensors for monitoring industrial plants and medical applications to sensor solutions for mobility, in the consumer sector and in science. Increasingly, questions of long-term stability, use under harsh environmental conditions and innovative assembly and connection technology are relevant.
In the workshop “Customised MEMS sensors for applications in science, Industry 4.0, automotive and mobility”, trends and current results from research, development and application for silicon-based MEMS sensors will be presented. The implementation of customer-specific requirements up to characterisation will also be highlighted.