
Cooperation with Ilmsens GmbH – Technology competition getstarted2gether
/in PackagingAfter a successful pitch in yesterday’s technology competition getstarted2gether, Hans-Christian Fritsch, Managing Director of Ilmsens GmbH, and Thomas Brock, Managing Director of the CiS Research Institute, today signed a letter of intent to further develop the founding project “Ultra-wideband microwave sensor technology
5th Industry Innovation Dialogue
/in Events, QuantumThe 5th Industrial Innovation Dialogue highlights current research competencies of quantum technologies for the Thuringian economy. Mario Bähr from the CiS Research Institute will present diamonds as a cost-efficient quantum material and report on results from the research project DiaQuantFab
8th GMM Workshop Micro-Nano-Integration 2020
/in Events, Force, MOEMSAt the 8th GMM Workshop Micro-Nano-Integration 2020 the CiS Research Institute will be represented with two exciting short lectures. The online conference is organized by the VDE/VDI Society for Microelectronics, Microsystems and Precision Engineering in cooperation with Ruhr-University Bochum
SiCer technology discussion of the BMBF growth core HIPS – High Performance Sensor Technology
/in Events, MEMSThuringia’s industrial companies and research institutes are working together in the HIPS growth core to develop new high-performance sensors based on the already patented SiCer technology and to market them jointly in the future. SiCer technology stands for a unique combination of silicon technology (Si) with ceramic multilayer technology (Cer)
Construction of complex miniaturized force sensor systems joined using glass solder
/in Force, MEMS, PackagingThe CiS Research Institute uses its own piezoresistive, miniaturised silicon strain sensors (Si-DMS) with an integrated full bridge for hybrid force sensors. Glass solder bonding is used to join the Si strain gauges on the spring body at 90° to each other
Online seminar successful – Further topics planned [video]
/in Events, Medical technology, MOEMSOur online seminar on the topic “In-the-ear sensor for vital monitoring” yesterday morning was a complete success. The speakers Dr. Martin Schädel, business unit manager MOEMS and Dr. Martin Jahn, project manager in the MOEMS department, presented an optical sensor which – integrated in an earmould – can evaluate blood pressure changes of each individual heartbeat
Silicon Science Award presented
/in MEMS, PressureOur employee Dr. Robert Täschner was awarded the Silicon Science Award for his dissertation “Process and sensor development for production-ready silicon-based pressure sensor systems suitable for high temperatures”. The CiS e.V. awards this prize for outstanding scientific achievements in the field of microsystems technology
New process for manufacturing miniaturized infrared emitter chips (MIREC)
/in IR, MEMSWith a new plasma-assisted etching process, a thin functional membrane and a break trench are simultaneously created for the following chip separation. In MEMS IR emitters, this results in more than a factor of 4 smaller areas and a dynamic range that is 2 times higher than that of the current state of the art
Better safe than sorry – flange seal monitoring
/in Force, MEMSPermanently safe flanged joints are the basic requirements for stable production processes and work at a high safety level. Recently developed silicon-based MEMS sensors are applied to bolt heads and measure their deformation due to changes in the preload force
Sensitive fluorescence sensors in cube sugar format
/in Medical technology, MOEMSSensitive fluorescence sensors in lump sugar format – Modern fluorescence sensors should be small, high-resolution and highly sensitive, inexpensive and robust. In the SmartFLU research project, the CiS Research Institute is developing a technological construction kit for a 2-channel fluorimeter











