The speakers Dr. Klaus Ettrich, Sebastian Pobering and Michael Blech held a webinar on October 21 on the topic of “Piezoresistive silicon pressure sensors for higher operating temperatures up to approx. 300°C”. In the webinar, which lasted about 45 minutes, there was an introduction to the structure and essential properties of this type of sensor, and in the second part, solutions for extending the operating temperature range up to approx. 300°C were presented.
The topic: Silicon-based piezoresistive pressure sensors have a wide range of applications in process measurement technology, automotive, medicine and research and development due to their very good sensor properties in terms of high linearity, low hysteresis and very good long-term stability. The operating temperature range of sensors manufactured with conventional technology is limited to approx. 130°C. By adapting chip design and semiconductor technology, the CiS Research Institute is able to develop and manufacture piezoresistive pressure sensor chips for application temperatures up to 300°C.
Further topics on our developments and current research results are in the planning stage. Be curious!
Recording of the webinar
Here you can find a recording of the webinar as it was available for the participants.