The CiS Research Institute uses its own piezoresistive, miniaturised silicon strain sensors (Si-DMS) with an integrated full bridge for hybrid force sensors. Glass solder bonding is used to join the Si strain gauges on the spring body at 90° to each other
Our online seminar on the topic “In-the-ear sensor for vital monitoring” yesterday morning was a complete success. The speakers Dr. Martin Schädel, business unit manager MOEMS and Dr. Martin Jahn, project manager in the MOEMS department, presented an optical sensor which – integrated in an earmould – can evaluate blood pressure changes of each individual heartbeat
Our employee Dr. Robert Täschner was awarded the Silicon Science Award for his dissertation “Process and sensor development for production-ready silicon-based pressure sensor systems suitable for high temperatures”. The CiS e.V. awards this prize for outstanding scientific achievements in the field of microsystems technology
With a new plasma-assisted etching process, a thin functional membrane and a break trench are simultaneously created for the following chip separation. In MEMS IR emitters, this results in more than a factor of 4 smaller areas and a dynamic range that is 2 times higher than that of the current state of the art
Permanently safe flanged joints are the basic requirements for stable production processes and work at a high safety level. Recently developed silicon-based MEMS sensors are applied to bolt heads and measure their deformation due to changes in the preload force
Sensitive fluorescence sensors in lump sugar format – Modern fluorescence sensors should be small, high-resolution and highly sensitive, inexpensive and robust. In the SmartFLU research project, the CiS Research Institute is developing a technological construction kit for a 2-channel fluorimeter
For the implementation of the National Hydrogen Strategy, the CiS Research Institute is partner in two research projects. The HYPOS consortium develops solutions for the entire value chain and broad application of green hydrogen in many industries
The CiS Research Institute joins the innovation network QPhot – Quantum Photonics to reach the emerging market of quantum photonics and to establish customized, marketable sensor solutions in this segment
By optimizing the measurement setup and the evaluation routine, an absolute comparison of the radiation characteristics of different measurements with each other is possible. Less than 3% measurement uncertainty is achieved with an angular resolution of 1.5. The standardization procedure is currently being tested
Passivation layers of synthetic diamond are particularly resistant to media. A cost-effective implementation of diamond coatings in relevant sensor areas has been reliably tested by adapting microsystem technologies
Konrad-Zuse-Str. 14
99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
