Novel heat flow sensors at the microTEC Südwest cluster conference
The microTEC Südwest Cluster Conference will take place from May 15 to 16, 2023 in Freiburg and will focus on important future trends and new fields of application with microsystems technology.
In Session A2 “Microsensors”, Dr. Ingo Tobehn-Steinhäuser will report on Monday, May 15, on the development of a novel heat flow sensor based on silicon technologies