Barometric MEMS pressure sensor for bio- and medical technology
At Sensor+Test 2017, the CiS Research Institute for Microsensors presents highly stable, media-resistant barometric pressure sensors in MEMS technology
Synthetic diamond coatings in microsystems technology
/in MEMS, Pressure, QuantumSynthetic diamond coatings can be manufactured on an industrial scale to be CMOS-compatible. The manufacturing and processing costs are comparable to those of other technologies, such as passivation or contacting. In order to implement diamond coatings as passive as well as active functional layers in sensors and to evaluate their industrial applicability, the CiS Research Institute is dedicated to pressure measurement in aggressive working environments and intelligent thermal management in current R&D projects
Better safe than sorry – measurement of pretensioning forces in bolted joints
/in MEMSAt the CiS Research Institute, new types of silicon-based MEMS sensors are currently being developed to check safety-relevant bolt connections. Such special bolts are used, for example, in mechanical engineering, materials handling technology and wind turbines
Silicon strain gauge
/in Force, Measurement, Medical technology, MEMS, Packaging, PressureFor precision force measurements, the CiS Research Institute has developed miniaturised silicon strain gauges (Si-DMS) with an integrated measuring bridge. The piezoresistive resistors are monolithically integrated in single-crystal silicon (K-factor = 80) and are available as a double strain element and as a full bridge
MEMS design for highly stable and high-precision pressure sensors – CiS Forschungsinstitut für Mikrosensorik cooperates with TU Hamburg-Harburg
/in MEMS, PressureResearchers and developers from both institutions are working together on a project to achieve greater reliability in the development and production of application-specific piezoresistive pressure sensors with a multi-physical simulation
Microcondensation sensors for the Japanese market – CiS signs distribution agreement with ESPEC Corp.
/in MEMSCiS Forschungsinstitut für Mikrosensorik GmbH announces the signing of a distribution agreement with ESPEC Corp. on microcondensation sensors for the Japanese market. With this agreement, CiS grants the exclusive right to market and sell customised microcondensation sensors in Japan
European network SMARTER-SI supports companies in manufacturing smart systems
/in Measurement, Medical technology, MEMS, MOEMS, PressureThe SMARTER-SI project offers a novel manufacturing platform across Europe on which innovative and intelligent sensor components and microsystems can be produced cost-effectively in small and medium quantities. Around 5.3 million euros in funding will flow into the development and testing of this platform until 2018
Dew sensor with calibrated digital output signal
/in MEMSCiS has expanded its CCC® platform and for the first time offers microcondensation sensors with a calibrated digital output signal.
The aim is to effectively support customer-specific developments (condensate mass, temperature, design, assembly and connection technology)
Strain gauges for demanding applications
/in Force, MEMS, PackagingFor precision force measurements, the CiS Research Institute from Erfurt has developed miniaturized silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages
Customized piezoresistive micro scanners
/in Force, MEMSThe CiS Research Institute is developing various miniaturized probes made of single-crystalline silicon with integrated piezoresistive measuring bridge for fast inline quality control of components made of a wide range of materials. High sampling rates are made possible by a very low probing force, a high natural frequency (3…5 kHz), and a very small mass (≈0.1 mg)