For precision force measurements, the CiS Research Institute from Erfurt has developed miniaturized silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages
The CiS Research Institute is developing various miniaturized probes made of single-crystalline silicon with integrated piezoresistive measuring bridge for fast inline quality control of components made of a wide range of materials. High sampling rates are made possible by a very low probing force, a high natural frequency (3…5 kHz), and a very small mass (≈0.1 mg)
For precision force measurements in medical technology applications, the CiS Research Institute from Erfurt, Germany, has developed silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages
A new miniaturised probe made of monocrystalline silicon with an integrated piezoresistive measuring bridge combines high scanning rates and low scanning force. The force-dependent deflection causes a change in the mechanical voltage, which is evaluated piezoresistively
A new miniaturised probe made of monocrystalline silicon with an integrated piezoresistive measuring bridge combines high sampling rates and low probing force. Robust against different environmental influences, the sensor closes a gap between AFM and a classic stylus
A miniaturized force sensor measures the forces at catheter tips that occur between the guide wire (catheter) and blood vessels during insertion. The KASYS mini-chip, just 200 x 220 x 640 µm in size and thus just twice as wide as a hair, is the heart of a haptic assistance system that will simplify catheterizations in medicine in the future and reduce the risk of injury
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99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
