At the CiS Research Institute, silicon-based MEMS sensors are being developed for testing safety-relevant bolted connections. Such special bolts can be used for example in mechanical engineering, materials handling and wind power plants
At Sensor+Test 2019, the CiS Research Institute will present current developments and research results from the MEMS, MOEMS and silicon detectors business units for applications in industry, medical and environmental technology
Dr. Thomas Frank, head of the MEMS department at the CiS Research Institute, explains miniaturized silicon strain sensors, 50 times more sensitive than a conventional metallic foil strain gauge and as small as the head of a pin, on April 4 at 15:00
Piezoresistive pressure sensor chips from CiS are used where high precision, stability and reliability are required. The same sensor principle is now also used for force measurement in silicon strain gages. The strain-sensitive resistors are monolithically integrated into wafer-thin chips as Wheatstone measuring bridge
For the first time, CiS presented a new sensor for testing special bolt in safety-relevant applications at the joint stand of LEG Thüringen at the Hannover Messe 2017. Described as “Bolt 4.0”, the model impressed the trade visitors
For precision force measurements, the CiS Research Institute has developed miniaturised silicon strain gauges (Si-DMS) with an integrated measuring bridge. The piezoresistive resistors are monolithically integrated in single-crystal silicon (K-factor = 80) and are available as a double strain element and as a full bridge
For precision force measurements, the CiS Research Institute from Erfurt has developed miniaturized silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages
The CiS Research Institute is developing various miniaturized probes made of single-crystalline silicon with integrated piezoresistive measuring bridge for fast inline quality control of components made of a wide range of materials. High sampling rates are made possible by a very low probing force, a high natural frequency (3…5 kHz), and a very small mass (≈0.1 mg)
For precision force measurements in medical technology applications, the CiS Research Institute from Erfurt, Germany, has developed silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages
A new miniaturised probe made of monocrystalline silicon with an integrated piezoresistive measuring bridge combines high scanning rates and low scanning force. The force-dependent deflection causes a change in the mechanical voltage, which is evaluated piezoresistively
Konrad-Zuse-Str. 14
99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
