The 2nd edition of the CiS Workshop “Development Trends in Piezoresistive Silicon Pressure Sensors” on October 13, 2022 addressed trends from industry and academia for silicon-based MEMS sensors. Uwe Schwarz, Fellow and Head of MEMS Sensors, X-FAB MEMS Foundry GmbH, explained in his keynote the building blocks of a modular manufacturing process for silicon-based pressure sensors.
The following three sessions covered new materials such as SiCER (silicon-ceramic composite technology), simulation and layout development, assembly and packaging, metrological characterization and applications. The present participants intensively discussed the individual contributions together with the online participants. It was an all-around successful workshop to exchange ideas among experts, to establish contacts and to find new starting points for upcoming workshops.
Don’t miss the next CiS workshop on NDIR sensors and components on 9th November.