Piezoresistive micro scanners for inline surface inspection in industrial manufacturing processes
A new miniaturised probe made of monocrystalline silicon with an integrated piezoresistive measuring bridge combines high scanning rates and low scanning force. The force-dependent deflection causes a change in the mechanical voltage, which is evaluated piezoresistively
Pixel detectors for particle and astrophysics – Development and production of particularly radiation-hard particle detectors
Since 1996, CiS has developed various technologies and detectors for tracking particles in large-scale experiments, especially ATLAS, CMS and ALICE at CERN, CMB at GSI / FAIR and DESY
Multi-channel fluorescence and absorption sensor system for microfluidics
The sensor system developed contains four channels, each with an excitation LED, optical filters and detectors for measuring light transmission and fluorescence. The channels are designed in such a way that they cover wide ranges of the visible spectrum and can thus be used for the detection of many different substances
Switchable miniature electrode array for impedance analysis of liquids and cell cultures
The newly designed three-dimensional micro-interdigital structures are used in the context of several projects to firstly measure the conductivity of liquids and suspensions in order to analyse their composition with the combination of other analytical methods. This is interesting for use in biogas plants, for example
Optical radiator-receiver modules as planar microsystems
A modular technology concept enables the efficient development of optical sensors with embedded light sources, micro-optics for beam shaping or steering, optical filters and an optimised detector array
Piezoresistive high-temperature pressure transducer cores
The HotDru project is about the development of high-temperature pressure sensor systems suitable for series production with an operating temperature of up to 300°C. The newly developed pressure sensor chips are realised in different versions, all of which are based on the “Silicon on Insulator” (SOI) principle as a basic structure
Dr Brodersen takes over the leadership of the IVAM Subsidies Division
Dr. Olaf Brodersen, Business Unit Manager MOEMS at the CiS Research Institute heads the new Funding Specialist Group in the International Trade Association for Microtechnology, Nanotechnology, New Materials and Optics & Photonics
Vital parameter sensor supports biofeedback therapy
According to a study published in 2003 by the NFO World Group, around 15 million people in Germany suffer from chronic pain. An interdisciplinary team of physicians, engineers and software developers wants to support their medical treatment
Micro probe for in-line surface inspection in machine tool rooms
A new miniaturised probe made of monocrystalline silicon with an integrated piezoresistive measuring bridge combines high sampling rates and low probing force. Robust against different environmental influences, the sensor closes a gap between AFM and a classic stylus
Multifunctional Si detectors – new platform of the KD OptiMi
The competence triangle “Optical Microsystems” (KD OptiMi), located in the Jena – Ilmenau – Erfurt region, has distinguished itself as an outstanding centre for the innovative combination of optical technologies and microsystems technology within the framework of the funding programme “Top-level Research and Innovations in the New States”
