
Assembly & Packaging – compact, application-specific and industry relevant
/in MOEMS, Packaging, UVA new micro assembly centre expands the technological basis for the development of technological solutions for the fully automated production of application-specific UV LED modules in different series sizes. The modular system concept enables the most important packaging steps to be carried out in one unit
Semiconductor Complex Measuring Station
/in Measurement, PressureManufacturing technology and sensors are tested and characterized with a high level of metrological effort in order to be able to demonstrate the desired properties with long-term stability. Different measurement methods are required for this purpose. The new semiconductor complex measuring station represents a milestone in the characterization of technologies and sensors
Wafer technologies for micro laser illuminations
/in MOEMS, WaferprocessingThe CiS Research Institute has developed a cost-effective technology for the production of highly stable laser illuminators in a batch process. In this process, up to 20,000 of these modules are mounted on a glass wafer. The VCSEL-based laser modules are characterized by high beam quality
New sensor technologies for pulse contour analysis, determination of heart rate variability and measurement of blood flow in tissue
/in Medical technology, MOEMS, PackagingCiS Research Institute introduces miniaturized silicon integrated multispectral photoplethysmography sensors. These are placed in the external auditory canal and are individually adapted to the patient
Highly stable temperature diodes with single-point calibration for the temperature range up to 220°C
/in Silicon Detectors, WaferprocessingAt the CiS Research Institute, technological processes for silicon wafers have been developed, with which a reproducible sensitivity dU/dT, i.e. the slope of the voltage versus temperature, could be achieved
Long Night of Science at the CiS Research Institute
/in EventsFor the 4th time, the research institute located in the southeast of the city of Erfurt participates in the Erfurt Science Night. On November 6, 2015, scientists and engineers will present their research results and applications
Micro Laser Doppler Sensors for Blood Flow Measurements
/in Medical technology, MOEMSThe CiS Research Institute starts developments on a miniaturized optical sensor for investigations of blood flow velocity in the skin. The sensor principle is based on the laser Doppler method. Here, elastic scattering at the moving blood components causes a shift of the light wavelength, which becomes measurable by coherent superposition with the excitation light
Customized piezoresistive micro scanners
/in Force, MEMSThe CiS Research Institute is developing various miniaturized probes made of single-crystalline silicon with integrated piezoresistive measuring bridge for fast inline quality control of components made of a wide range of materials. High sampling rates are made possible by a very low probing force, a high natural frequency (3…5 kHz), and a very small mass (≈0.1 mg)
Optical microsensors for measuring pulse contour and heart rate variability
/in Events, Medical technology, MOEMSCiS Research Institute presents multispectral photoplethysmography sensors for applications in pain therapy at SENSOR+TEST 2015.
A mobile biofeedback system that records vital parameters of the patient measured in the external auditory canal and processes them further with the help of a smartphone app.
Miniaturized silicon strain elements
/in Force, Medical technology, MEMS, PackagingFor precision force measurements in medical technology applications, the CiS Research Institute from Erfurt, Germany, has developed silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages











