Page 3 – CiS

Completion of the HIVOS Project: Hybrid Integrated Optical Sensors Based on Pre-structured Adhesive Layers

15. July 2026/in MOEMS, Packaging, Process development

The HIVOS research project investigated the interaction of various pre-structured adhesive layers in combination with high-precision joining technologies and automated assembly processes for the hybrid assembly of complex optoelectronic microsystems. Newly developed automation solutions now enable the fully automated assembly of modules at the wafer or panel level, thereby significantly reducing process times

Infrared Microsensor System for Fluidic Monitoring

8. July 2026/in MOEMS, Pressure

The OSCAR collaborative project is developing a novel high-pressure optical sensor system for inline monitoring of technical fluids under real-world process conditions. The goal is to integrate a high-pressure-resistant optical cell with modular optomechanical components and integrated electronics/firmware into a compact screw-in solution. This enables reproducible measurements directly at the process – with high resistance to pressure, temperature, and media – without requiring additional installation effort

KoSenDi Project Completion: Compact Sensor Unit for Measuring Magnetic Fields Using Diamond Fluorescence

2. July 2026/in MOEMS

In the KoSenDi research project, specific optical detectors were developed that achieve performance improvements and cost advantages through high application specificity. A partially transparent photodiode can measure the intensity of the excitation light directly in the optical path, and for fluorescence analysis, thin-film filter technology was integrated into a photodiode to suppress the excitation light

Interactive Experiments at the 2026 Ilmenau Science Night

23. June 2026/in Events, Force, MEMS

On 20th June 2026, the CiS Research Institute invited visitors to explore, participate, and marvel at interactive experiments and demonstrations as part of Ilmenau’s Science Night. Visitors of all ages were able to immerse themselves in the fascinating world of research and technology. We presented a diverse range of our silicon-based microsensors for visitors to learn about and try out

ApproxiSens Project Completion: Development of a Force Transducer

17. June 2026/in Force, MEMS

The successfully completed ZIM collaboration project ApproxiSens resulted in the development of a novel measurement system for hardness testers that raises industrial hardness measurement to a new level of quality. The newly developed measurement system for industrial hardness testing increases throughput in batch measurements by using precise control to achieve high speeds as the indenter approaches the test surface

Macro-performance with 18 running enthusiasts at the RUN corporate run

12. June 2026/in CiS general

At the 17th annual RUN Corporate Run, an 18-member team from the CiS Research Institute ran the five-kilometer course through Erfurt’s beautiful, historic old town for the first time. The team wore matching blue shirts emblazoned with the slogan “Micro-sensors, Macro-performance!”

Launch of the ReSpektIS project: Integration sphere with Speckle-Tech technology for the refractive index

9. June 2026/in MOEMS

The new ReSpektIS research project focuses on the development of a novel, compact optical component for a measurement system designed to perform highly accurate relative measurements of the refractive index of gaseous media, or a refractometer based on an integrating sphere for highly sensitive refractive index measurements of gaseous media

Silicon-based microsensors at SENSOR+TEST in Nuremberg

3. June 2026/in Events, MEMS, MOEMS

From 9th-11th June 2026, the CiS Research Institute will once again be exhibiting at the international gathering for sensor, measurement, and testing technology in Nuremberg. At SENSOR+TEST 2026, interested visitors can meet our experts again this year at Booth 501 in Hall 1 to discuss the latest research findings in silicon-based microsensor technology.
At the 23rd ITG/GMA Symposium “Sensors and Measurement Systems 2026,” the accompanying scientific conference at the Nuremberg Convention Center West (NCC West), the CiS Research Institute will be represented with four scientific presentations

Launch of the Pash-Sense Project: Development of a Highly Sensitive Hydrogen Sensor Based on a Palladium-Silicon Schottky Diode

28. May 2026/in uncategorized

To enable the early detection of hydrogen leaks at trace levels, the CiS Research Institute is developing a novel, highly sensitive sensor based on a Pd/Si Schottky diode with an integrated heating structure. To ensure the flawless manufacturing required for this component, the wafer inspection system – recently approved as part of the “TechWB” investment project – is being used for high-precision defect analysis in the submicrometer range

Competitive German Quantum Computer (CoGeQ): Subproject involving the development of demonstrators successfully completed

20. May 2026/in Events, Photonic, Quantum

The final results of the research conducted as part of the “CoGeQ” project were presented at Quantum Photonics 2026 in Erfurt in early May. The collaborative project aimed to demonstrate a mobile spin-based quantum processor based on NV centers in diamond. The CiS Research Institute was responsible for the field of assembly and interconnection technology and developed an efficient method for assembling the layered stacks consisting of a diamond chip and a silicon interposer