From 31st March to 4th April 2025, the CiS Research Institute will be presenting its technology portfolio at #hmi25. In Hall 6 at the LEG joint stand in Thuringia (Stand F61), our experts will be presenting silicon-based MEMS and MOEMS sensor concepts for a wide range of applications
From 12th-15th November 2024, we will be showcasing a selection of our research and development results. The European semiconductor industry will meet in the halls of Messe München. Interested visitors will find our stand at the joint Thuringian LEG stand C1718 in Hall C1. We look forward to your visit and a stimulating exchange of ideas
From 11th to 13th June 2024, we look forward to an inspiring dialog with you at our booth at the SENSOR+TEST in Nuremberg. We will present current research results in the development of very high-resolution capacitive MEMS acceleration sensors for inclination and leveling measurements as well as special tandem diodes for a compact standing wave interferometer. The 22nd GMA conference will take place at the same time. Here, the CiS Research Institute will present a diamond-based pressure sensor concept and give a second lecture on fast IR MEMS emitters for NDIR applications
During the Hannover Messe, which starts next week, the CiS Research Institute will be presenting an electrically isolated incremental sensor at the joint Thuringian stand in Hall 3, Stand D76. As part of the GalGiS funding project, new silicon technologies have been developed to achieve such galvanic isolation at chip level
Start for the preliminary research project “High-End Acceleration Sensors”(HEB) – The project aims at the development of a CMOS-compatible manufacturing process for high-resolution capacitive MEMS acceleration sensors with a resolution of 0.001⁰ for cost-efficient application as tilt sensor
Konrad-Zuse-Str. 14
99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
