HEB – CiS

Highlights of Sensor+Test 2024 in Nuremberg

30. May 2024/in Events, MEMS, MOEMS

From 11th to 13th June 2024, we look forward to an inspiring dialog with you at our booth at the SENSOR+TEST in Nuremberg. We will present current research results in the development of very high-resolution capacitive MEMS acceleration sensors for inclination and leveling measurements as well as special tandem diodes for a compact standing wave interferometer. The 22nd GMA conference will take place at the same time. Here, the CiS Research Institute will present a diamond-based pressure sensor concept and give a second lecture on fast IR MEMS emitters for NDIR applications

Highlight of the CiS Forschungsinstitut at the Hannover Messe 2024: Galvanically isolated incremental sensor

18. April 2024/in Events, IR, Pressure, UV

During the Hannover Messe, which starts next week, the CiS Research Institute will be presenting an electrically isolated incremental sensor at the joint Thuringian stand in Hall 3, Stand D76. As part of the GalGiS funding project, new silicon technologies have been developed to achieve such galvanic isolation at chip level

Start for new preliminary research project

22. June 2021/in Measurement, Medical technology, MEMS, Waferprocessing

Start for the preliminary research project “High-End Acceleration Sensors”(HEB) – The project aims at the development of a CMOS-compatible manufacturing process for high-resolution capacitive MEMS acceleration sensors with a resolution of 0.001⁰ for cost-efficient application as tilt sensor

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