The speakers Dr. Martin Schädel as well as Dr. Andreas Winzer presented an online webinar on the topic of “3D structured photodiodes” on 14.07. 2021. In the webinar, which lasted just under one hour, they used illustrative examples to report on the variety of new optical sensor solutions using technologies for 3D processing of silicon
The 3D structuring of silicon is becoming increasingly important for optical and opto-electronic applications in microsystems technology. For the reliable and low-loss coupling of optical fibers to photodiodes, the CiS Research Institute developed new microstructuring technologies for the fabrication of cavities with flank angles of 45° and 90° and high optical absorption of the sensitive coupling surface
Konrad-Zuse-Str. 14
99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
