Our employee Dr. Robert Täschner was awarded the Silicon Science Award for his dissertation “Process and sensor development for production-ready silicon-based pressure sensor systems suitable for high temperatures”. His investigations and results make a scientifically sound and in many aspects practically relevant contribution to the design of miniaturized pressure sensors for applications up to 300°C. He consistently considers all conditions for process suitability and thus series production. Supported by numerous experiments and extensive mechanical and electrical tests, quantitative statistical statements are secured.
Dr. Robert Täschner completed his dissertation at the TU Ilmenau, Faculty of Electrical Engineering and Information Technology, under the supervision of Prof. Jens Müller.
The CiS Research Institute is very pleased for this award and uses the gained knowledge for industry-driven research projects.
The Silicon Science Award is presented by CiS e.V. for outstanding scientific achievements in the field of microsystems technology.