From May 10-12, 2022, Sensor+Test, the world’s leading forum for sensor, measurement and testing technology, will once again be held as a presence event. We look forward to showing interested visitors the latest results of our research and development work at our booth 1-501 in Hall 1 of the Exhibition Center Nuremberg.
Piezoresistive pressure sensor chips with temperature compensation integrated on the sensor chip for operating temperatures up to about 300°C
By adapting chip design and semiconductor technology, piezoresistive pressure sensor chips have been developed and manufactured in the extended operating temperature range from +40°C to +300°C.
Probe system with reduced probing force for determining instrumented indentation hardness
For hardness measurement using the instrumented indentation test method, displacement-resolved force measurement is required. This requires both a precise force sensor and a precise displacement sensor, as well as a precise diamond tip. The measurement system will be demonstrated.
Sensors for determining the operating force of fasteners
Based on a MEMS technology platform, a sensor module was developed to determine the preload force and the operating force as well as their change over time. The sensor consists of miniaturized strain gauges.
1×1 mm² chips with a structured 3D photodiode array that detects incident light from different directions
The new RISEQ sensor technology from the CiS Research Institute enables the development and production of monolithically integrated, direction-sensitive sensors. The basic concept is based on the integration of four photodiodes in the walls of a cavity in silicon.
IR components for gas sensors and temperature measurement
The CiS Research Institute has focused on the development and production of IR emitters and thermopile sensors. Both solutions have in common that the actual active zone is spanned within a very thin membrane. The resulting assemblies are very small with edge lengths in the range of 1 to 3 mm and exhibit fast response times.
Electron detector for low energies of 1keV
Scanning electron microscopes (SEMs) are commonly used in defect analysis in manufacturing. Silicon electron detectors are an important component in these to detect electrons backscattered from the sample. Low-energy electron beams with high quantum efficiency are used for particularly surface-sensitive inspection.
Tandem diodes for standing wave interferometers (SWIF)
The newly developed tandem diodes significantly simplify the setup of the well-known Michelson interferometer, a high-precision measurement method for length and position determination in precision machines.
Parallel to the Sensor+Test 2022 exhibition, the 21st ITG/GMA Sensors and Measuring Systems 2022 Conference will be held at the Nuremberg Congress Center. This scientific event focuses on the integration of sensors in measurement systems and on their application. On Tuesday, 10.05.2022, a scientific poster session will take place from 17:45 – 19:00. At poster booth 19, our MEMS department head, Dr. Thomas Frank will give an insight into the research work on the topic “Miniaturized ultrasonic sensors for high humidity determination above 200°C”. Using a suitable setup with MEMS technology, it is possible to determine the speed of sound up to 200°C in an air-water mixture and to derive the water content.
You can get your free exhibition ticket via this link:
We are looking forward to seeing you in Nuremberg!