Thuringia’s Minister of Economic Affairs, Mr. Tiefensee, presented a funding decision to the two managing directors, Mr. Brock and Prof. Ortlepp, during his visit to the CiS Research Institute on 29th November 2022. The funds come from EU REACT funds. Industry-related research institutions from Thuringia were able to qualify in a competitive call. The focus was on technologies and processes for a more sustainable use of energy and resources.
This grant allows the CiS Research Institute to invest in a modern high-temperature plant of the latest generation. This offers various options for flexible use in layer production on large-area substrates while reducing energy consumption. It also has an interface for computer-aided process parameter recording and control. Combined with the possibility of remote monitoring, the further digitalization of process control is being advanced within the CiS Research Institute.
Together with partners from industry and research, the CiS Research Institute is engaged in the field of MEMS and MOEMS sensors for applications in environmental technologies, climate protection, medical technology, process monitoring as well as quantum technologies. An example is the use of green hydrogen as a valuable energy carrier for energy-intensive processes in industry. This requires sensors that can be used for the electrolysis of water, the storage and leakage detection of green hydrogen in the various plants. The production of these sensors requires largely energy-intensive processes within the value chain from the starting material silicon to the finished sensor. This new facility will improve the energy balance and efficiency in the production of sensors.