Silicon sensors in the spotlight of micro- and nanotechnology
In the kick-off event on 06.09.2022 for the new digital series “Spotlights of Micro- and Nanotechnology”, initiated by the IVAM Association for Microtechnology, Dr. Martin Schädel, Business Unit Manager MOEMS at the CiS Research Institute, will present, among others, the topic “Silicon Sensors for Optical Process Monitoring”
Congress contribution on passivation options for MEMS sensors at the ACHEMA in Frankfurt
In her congress contribution at ACHEMA, Dr. Heike Wünscher from the MEMS department at the Cis Research Institute, presents research results for the passivation of silicon-based MEMS sensors and their use as flow sensors in harsh environments
Emitters with blackbody properties due to integrated texture
For infrared emitters with blackbody properties, the CiS Research Institute developed a simplified manufacturing process. It produces a performance-enhancing micro-texture. The patent PCT/EP2018/083263 has been granted for this
Fast infrared emitter array for gas sensing applications
In the newly opened research project, IR emitter arrays are developed, which are characterized by high dynamics and simultaneously large beam strength
Development of a high pressure sensor up to 300 MPa with flush media connection
The focus of the new research project is the development of a technology for sensors with flush media connection and strict separation to the electrical side for applications in the high-pressure range up to 300 MPa
Inkjet printing galvanically amplified infrared emitter
The newly launched research project is dedicated to the development of inkjet printing processes as well as a galvanic deposition process for the production of infrared emitters for high temperature applications up to 800°C
Reduction of calibration effort for high-precision pressure sensors
A significant reduction in calibration costs is achieved by means of an optimized layout of a measuring bridge with piezoresistive measuring resistors and use of the longitudinal effect in the project “Pressure sensor made of <110> silicon with increased linearity”
CiS Research Institute at the CICMT 2022 in Vienna
The international conference CICMT starts tomorrow in Vienna. The CiS Research Institute together with VIA electronic GmbH will present current research results of the HIPS growth core with test wafers and test setups for application in industrial automation in the accompanying trade exhibition
Energy Autonomous Sensor Systems – CiS Research Institute at EASS 2022
The 11th EASS conference will be held in Erfurt on July 5 and 6 and will focus on the resource-saving development of energy-autonomous sensor systems (EASS) and their networking. The CiS Research Institute participates with a presentation and a poster and offers an on-site visit for conference participants
