
Project completed: DefEin – Si detectors with flat entrance window
/in Measurement, UVIn the successfully completed DefEin project, doping technologies were developed that enable high energy resolution of radiation sensors consisting of silicon by keeping the highly doped regions on the entrance side of the radiation to be detected as flat as possible
Project start: Complex tools for device simulation (KTB)
/in MEMS, Simulation & DesignThe new project focuses on the creation of interfaces to link different existing design and simulation tools, using the development of high-precision and long-term stable pressure sensors at the CiS Research Institute as an example
Silicon based piezoresistive sensors with a minimal bridge base detuning
/in Force, MEMS, PressureThe new R&D project miniOffset focuses on the development of a silicon-based piezoresistive technology platform with minimal bridge base detuning. The basis is formed by CMOS/MEMS-compatible materials combined with cost-effective manufacturing processes
Expert meeting on current development trends in piezoresistive silicon pressure sensors
/in Events, MEMS, PressureIn the 2nd edition of the CiS Workshop on October 13, 2022, experts from industry and science exchanged views on current development trends in piezoresistive silicon pressure sensors. Also, don’t miss the next CiS Workshop on 9th November on NDIR sensors and components
Two trees won in environmental competition for planting campaign
/in CiS generalAlready for the third time, the CiS Research Institute participates in the environmental competition “Stadtradeln”. The 15-member team cycled 2,300 kilometers during the campaign period. Thereby, the cyclists could not only avoid 354 kg CO2, but also won two trees for the tree planting campaign
Board election at FiZ e.V. with handover of the baton
/in Events, PersonnelOn the occasion of the election of the board of directors at the general meeting of the Forschungs- und Industriezentrum Erfurt (FiZ) e.V. last week, the farewell of long-standing board members also took place and the baton was handed over to a new board of directors
Congratulations to the TU Ilmenau and the ZMN
/in Events, PoliticsDuring the festive event on October 5, 2022 under the motto “Research, Teaching, Living”, our managing director Thomas Brock, on behalf of all employees of the CiS Research Institute, congratulates Univ.-Prof. Dr.-Ing. habil. Kai-Uwe Sattler on 30 years of Ilmenau Technical University. At the same time, the 20th anniversary of the Center for Micro- and Nanotechnology (ZMN) at the TU Ilmenau was also celebrated
Project start New refractive index sensor (BZS) – method for content analysis and quality monitoring of various liquid media
/in MOEMSThe aimof the current R&D project New Refractive Index Sensor (BZS) is to develop a novel compact sensor for highly accurate relative measurement of the refractive index of liquids within a flow cell or cuvette
Sensor technology for energy supply at the elmug4future conference
/in Energy, Events, MEMSDr. Heike Wünscher will report on “Energy storage by water electrolysis” at the technology conference elmug4future tomorrow in Friedrichroda. In addition, the CiS Research Institute is in charge of the booth of the growth core HIPS (High Performance Sensors) in the accompanying exhibition
Vital parameters for aviation by light sensor
/in Events, Medical technology, MOEMSAs part of the celebratory event for the 30th anniversary of the Aeroclub Arnstadt e.V. in the hangar of the Alkersleben airfield, Dr. Martin Schädel, Business Unit Manager MOEMS at the CiS Research Institute, gave a guest lecture on the topic of “Detection of important vital parameters with light sensor in the ear”











