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Long-term stable passivation of piezoresistive sensors for demanding sensor environments

11. January 2021/in MEMS, Pressure

Direct contact with the medium is difficult to implement for silicon-based microsensors. In order to fully exploit miniaturisation, corrosion protection is applied at chip level. This makes an application in more demanding environments possible even without additional protective constructions

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https://www.cismst.de/wp-content/uploads/2020/12/news-2021-01-11-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2021-01-11 14:55:002021-02-15 10:16:38Long-term stable passivation of piezoresistive sensors for demanding sensor environments

Silicon detector for electrons with energies of 1 keV

15. December 2020/in Automotive, Photonic, Quantum, Silicon Detectors, Simulation & Design

Increasing the quantum efficiency of silicon diodes in scanning electron microscopes – The SiekeV research project is working on improving scanning electron microscopes for analysing near-surface structures. The detection of low-energy electrons makes it possible to take very surface-sensitive SEM images

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https://www.cismst.de/wp-content/uploads/news-2020-12-15-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-12-15 14:00:002021-02-15 10:17:21Silicon detector for electrons with energies of 1 keV

Burgermann brings Christmas menu

10. December 2020/in CiS general

Since a classic joint end-of-year event with all colleagues is not possible this year, the management of the CiS Research Institute engaged the Burgermann Foodtruck. With a sophisticated corona-compliant ordering procedure, all employees were able to choose from different burger menus and enjoy their pre-Christmas thank-you for their commitment in this not easy year yesterday lunchtime

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https://www.cismst.de/wp-content/uploads/news-2020-12-10-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-12-10 14:10:002021-02-15 10:18:17Burgermann brings Christmas menu

Efficient coupling optics for single photon detectors (EkoPHo)

2. December 2020/in MOEMS, Photonic, Quantum

A new technology platform is used for targeted optical adaptation of an SNSPD silicon chip stack. This is an extremely compact construction of a superconducting detector with efficient signal coupling in a chip compound as well as integrated optics and mounting of a fibre

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https://www.cismst.de/wp-content/uploads/news-2020-12-02-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-12-02 14:10:002021-02-15 10:18:51Efficient coupling optics for single photon detectors (EkoPHo)

SiCer technology for high performance sensor systems

24. November 2020/in Energy, Medical technology, MEMS

At InnoCON Thuringia on 24th November 2020, Dr. Olaf Brodersen will explain the latest results of the growth core HIPs and the SiCer technologies to be developed therein for high performance sensor systems. The InnoCON starts as online event at 3:00 PM

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https://www.cismst.de/wp-content/uploads/news-2020-11-24-home.jpg 91 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-11-24 11:18:002021-02-15 10:20:38SiCer technology for high performance sensor systems

Valuable seconds – continuously monitoring blood pressure with optical sensors

23. November 2020/0 Comments/in Medical technology, MOEMS

The CiS Research Institute has been working for more than 10 years on the development of photoplethysmographic sensors for the continuous measurement of vital parameters such as heart rate, heart rate variability and blood oxygen saturation. The most recent result is a miniaturised sensor that also monitors blood pressure in the ear

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https://www.cismst.de/wp-content/uploads/news-2020-11-23-home.jpg 90 119 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-11-23 12:35:002021-02-18 07:25:35Valuable seconds – continuously monitoring blood pressure with optical sensors

10th Advisory Board Meeting of the AUVL Consortium

19. November 2020/in Medical technology, MOEMS, UV

The 10th advisory board meeting of the Advanced UV for Life (AUVL) consortium is taking place today as an online event. The CiS Research Institute is the coordinator of the working field “Modules & Measurement Technology”. Prof. Thomas Ortlepp will give a lecture from 11:45 AM to 12:20 PM about the value creation and supply chains within the field of work

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https://www.cismst.de/wp-content/uploads/news-2020-11-19-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-11-19 12:53:002021-02-15 10:24:4010th Advisory Board Meeting of the AUVL Consortium

Patent application for multilayer structures for chemically resistant, long-term stable differential pressure sensors

13. November 2020/in MEMS, Pressure

Harsh environmental conditions require robust and stable pressure sensors. The new and further development of wafer-level packaging technologies increases performance, extends areas of application and reduces manufacturing costs. The result is patent pending

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https://www.cismst.de/wp-content/uploads/news-2020-11-13-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-11-13 13:08:002021-02-15 10:25:29Patent application for multilayer structures for chemically resistant, long-term stable differential pressure sensors

MEMS workshop: Wafer bonding process for pressure sensors

30. October 2020/in Events, MEMS, Pressure

The participants of the CiS MEMS workshop on pressure sensor technology discussed online the development of sensor elements, their assembly, test methods and applications. Innovative AVT, in particular wafer bonding processes, were a focal point this time

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https://www.cismst.de/wp-content/uploads/news-2020-10-30-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-10-30 13:19:002021-02-15 10:26:00MEMS workshop: Wafer bonding process for pressure sensors

Representative of the TMWWDG visits the CiS Research Institute

29. October 2020/in Politics

State Secretary for Science and Higher Education Carsten Feller and Robert Fetter, acting head of the “Technology Promotion” unit, met yesterday afternoon with the management of the CiS Research Institute at its south-east Erfurt location

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https://www.cismst.de/wp-content/uploads/news-2020-10-29-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-10-29 13:29:002021-02-15 10:26:28Representative of the TMWWDG visits the CiS Research Institute
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  • Five strong teams at the 37th Erfurt Triathlon

    26. August 2025
  • We’re cycling too! Five years of City Cycling at the CiS Research Institute

    18. August 2025
  • Project completion: Inkjet printing of galvanically amplified infrared emitters

    5. August 2025
  • New assembly technologies for IR components based on polymer-free joining technologies

    29. July 2025
  • Development of a high-pressure sensor up to 300 MPa with front-flush media connection

    23. July 2025

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