At the BMWi 2021 Innovation Day for SMEs, CiS Forschungsinstitut für Mikrosensorik GmbH will present its results of the research project “Miniaturized Infra-Red Emitter Chip” in the section Success Stories. The innovative project was funded within the program INNO-KOM – Research Results for SMEs. On the event page, the project is assigned to the focus topic digitalization/artificial intelligence. For the first time, this annual showcase of successful and innovative realized projects will take place as a digital event.
In the MIREC project, a plasma-assisted etching process was developed which simultaneously produces a thin functional membrane and a fracture trench for the subsequent chip separation. Compared to the state of the art, MEMS IR emitters have a surface area that is smaller by a factor of 4 and a dynamic range that is higher by a factor of 2. Such assemblies are used as light sources in optical gas sensors, where low cost combined with high optical performance and fast switching behavior are required. With the developed emitters, which are only 1 mm² small, a long-term stable emission > 10 mW and dynamics above 100 Hz were achieved.
The research and development work in the Miniaturized InfraRed Emitter Chip (MIREC) project was funded by the German Federal Ministry for Economic Affairs and Energy.
Funding code: 49MF160085