With a new plasma-assisted etching process, a thin functional membrane and a break trench are simultaneously created for the following chip separation. In MEMS IR emitters, this results in more than a factor of 4 smaller areas and a dynamic range that is 2 times higher than that of the current state of the art
Permanently safe flanged joints are the basic requirements for stable production processes and work at a high safety level. Recently developed silicon-based MEMS sensors are applied to bolt heads and measure their deformation due to changes in the preload force
Sensitive fluorescence sensors in lump sugar format – Modern fluorescence sensors should be small, high-resolution and highly sensitive, inexpensive and robust. In the SmartFLU research project, the CiS Research Institute is developing a technological construction kit for a 2-channel fluorimeter
For the implementation of the National Hydrogen Strategy, the CiS Research Institute is partner in two research projects. The HYPOS consortium develops solutions for the entire value chain and broad application of green hydrogen in many industries
The CiS Research Institute joins the innovation network QPhot – Quantum Photonics to reach the emerging market of quantum photonics and to establish customized, marketable sensor solutions in this segment
By optimizing the measurement setup and the evaluation routine, an absolute comparison of the radiation characteristics of different measurements with each other is possible. Less than 3% measurement uncertainty is achieved with an angular resolution of 1.5. The standardization procedure is currently being tested
Passivation layers of synthetic diamond are particularly resistant to media. A cost-effective implementation of diamond coatings in relevant sensor areas has been reliably tested by adapting microsystem technologies
After a successful pitch at getstarted2gether, the founding project “Early Fault Detection in High-Performance Batteries” of DC Industrie Entwicklung GmbH is currently being further developed to production and process maturity. The CiS Research Institute supports the start-up during the funding period with its technical infrastructure as well as its competence in silicone from more than 25 years
The current situation around Corona and the COVID-19 pandemic requires very dynamic action and above-average commitment. Within the scope of industrial orders the CiS Research Institute develops and manufactures thermopiles together with partners. These sensors allow non-contact temperature measurement and are used in contactless thermometers in gate solutions
Within this 1st status workshop on the BMBF growth core HIPS on March 19, Andrea Cyriax will present current developments in the field of MEMS sensor technology. In a second presentation, Dr. Klaus Ettrich will introduce the joint project on gas sensor technology, which is coordinated by the CiS Research Institute
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E-Mail: info@cismst.de
