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SiCer technology discussion of the BMBF growth core HIPS – High Performance Sensor Technology

14. September 2020/in Events, MEMS

Thuringia’s industrial companies and research institutes are working together in the HIPS growth core to develop new high-performance sensors based on the already patented SiCer technology and to market them jointly in the future. SiCer technology stands for a unique combination of silicon technology (Si) with ceramic multilayer technology (Cer)

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https://www.cismst.de/wp-content/uploads/news-2020-09-14-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-09-14 11:10:002021-02-15 10:32:11SiCer technology discussion of the BMBF growth core HIPS – High Performance Sensor Technology

Construction of complex miniaturized force sensor systems joined using glass solder

3. August 2020/in Force, MEMS, Packaging

The CiS Research Institute uses its own piezoresistive, miniaturised silicon strain sensors (Si-DMS) with an integrated full bridge for hybrid force sensors. Glass solder bonding is used to join the Si strain gauges on the spring body at 90° to each other

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https://www.cismst.de/wp-content/uploads/news-2020-08-03-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-08-03 11:20:002021-02-15 10:32:43Construction of complex miniaturized force sensor systems joined using glass solder

Online seminar successful – Further topics planned [video]

16. July 2020/in Events, Medical technology, MOEMS

Our online seminar on the topic “In-the-ear sensor for vital monitoring” yesterday morning was a complete success. The speakers Dr. Martin Schädel, business unit manager MOEMS and Dr. Martin Jahn, project manager in the MOEMS department, presented an optical sensor which – integrated in an earmould – can evaluate blood pressure changes of each individual heartbeat

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https://www.cismst.de/wp-content/uploads/news-2020-07-16-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-07-16 11:51:002021-02-15 10:33:19Online seminar successful – Further topics planned [video]

Silicon Science Award presented

15. July 2020/in MEMS, Pressure

Our employee Dr. Robert Täschner was awarded the Silicon Science Award for his dissertation “Process and sensor development for production-ready silicon-based pressure sensor systems suitable for high temperatures”. The CiS e.V. awards this prize for outstanding scientific achievements in the field of microsystems technology

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https://www.cismst.de/wp-content/uploads/news-2020-07-15-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-07-15 07:27:002021-02-15 10:33:54Silicon Science Award presented

New process for manufacturing miniaturized infrared emitter chips (MIREC)

10. July 2020/in IR, MEMS

With a new plasma-assisted etching process, a thin functional membrane and a break trench are simultaneously created for the following chip separation. In MEMS IR emitters, this results in more than a factor of 4 smaller areas and a dynamic range that is 2 times higher than that of the current state of the art

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https://www.cismst.de/wp-content/uploads/news-2020-07-10-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-07-10 08:38:002021-02-15 10:39:20New process for manufacturing miniaturized infrared emitter chips (MIREC)

Better safe than sorry – flange seal monitoring

22. June 2020/in Force, MEMS

Permanently safe flanged joints are the basic requirements for stable production processes and work at a high safety level. Recently developed silicon-based MEMS sensors are applied to bolt heads and measure their deformation due to changes in the preload force

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https://www.cismst.de/wp-content/uploads/news-2020-06-22-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-06-22 09:06:002023-02-02 08:43:07Better safe than sorry – flange seal monitoring

Sensitive fluorescence sensors in cube sugar format

15. June 2020/in Medical technology, MOEMS

Sensitive fluorescence sensors in lump sugar format – Modern fluorescence sensors should be small, high-resolution and highly sensitive, inexpensive and robust. In the SmartFLU research project, the CiS Research Institute is developing a technological construction kit for a 2-channel fluorimeter

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https://www.cismst.de/wp-content/uploads/news-2020-06-15-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-06-15 09:34:002024-02-06 10:52:53Sensitive fluorescence sensors in cube sugar format

MEMS sensors for green hydrogen

12. June 2020/in Energy, MEMS, Pressure

For the implementation of the National Hydrogen Strategy, the CiS Research Institute is partner in two research projects. The HYPOS consortium develops solutions for the entire value chain and broad application of green hydrogen in many industries

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https://www.cismst.de/wp-content/uploads/news-2020-06-12-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-06-12 10:00:002021-02-15 10:43:58MEMS sensors for green hydrogen

Innovation Network QPhot

5. June 2020/in Photonic, Quantum

The CiS Research Institute joins the innovation network QPhot – Quantum Photonics to reach the emerging market of quantum photonics and to establish customized, marketable sensor solutions in this segment

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https://www.cismst.de/wp-content/uploads/news-2020-06-05-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-06-05 11:11:002021-02-15 10:44:27Innovation Network QPhot

High measurement accuracy for the optical characterization of UV LEDs

13. May 2020/in MOEMS, UV

By optimizing the measurement setup and the evaluation routine, an absolute comparison of the radiation characteristics of different measurements with each other is possible. Less than 3% measurement uncertainty is achieved with an angular resolution of 1.5. The standardization procedure is currently being tested

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https://www.cismst.de/wp-content/uploads/news-2020-05-13-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2020-05-13 11:40:002021-02-15 10:45:42High measurement accuracy for the optical characterization of UV LEDs
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  • Launch of the aQuSiS Project: Acceptor-Based Quantum Systems in Silicon

    12. May 2026
  • Project Completion NH3-BZ: Photoacoustic Sensor for Hydrogen Production

    6. May 2026
  • CiS Research Institute Returns as an Exhibitor at Quantum Photonics

    29. April 2026
  • Technologies for the Future: CiS Research Institute at the 2026 Hannover Messe

    20. April 2026
  • Plenary presentation at the 5th Symposium on Electronics and System Integration

    8. April 2026

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