In the InOxA research project, the TOPCon contact developed for silicon photovoltaics was adapted for use in sensor diodes. To achieve this, a thin barrier oxide and highly doped polysilicon were deposited onto the base material, so that the contact also serves to passivate both the active area and the substrate contact
Piezo-junction sensors simultaneously measure process parameters such as pressure, temperature, and vibration – making them ideal for applications in process measurement technology, power plants, oil and gas, and aerospace. The recently completed PJS research project investigated various influencing factors and relationships to determine the optimal pn junction
One characteristic of silicon-based semiconductor resistors used as temperature sensors is that their resistance is affected by magnetic fields. The new CryoMAG-RX research project focuses on the development of a wafer-level temperature sensor that is easy to manufacture, in which the position of a variably adjustable temperature reference point and the shape of the characteristic curve can be influenced – either for specific applications or for optimal metrological performance – by a constant magnetic field
In the new oLGAD research project, we are investigating layer systems designed to improve the performance of detectors by reducing dark current and increasing sensitivity for the detection of low-energy electrons
The HIVOS research project investigated the interaction of various pre-structured adhesive layers in combination with high-precision joining technologies and automated assembly processes for the hybrid assembly of complex optoelectronic microsystems. Newly developed automation solutions now enable the fully automated assembly of modules at the wafer or panel level, thereby significantly reducing process times
The OSCAR collaborative project is developing a novel high-pressure optical sensor system for inline monitoring of technical fluids under real-world process conditions. The goal is to integrate a high-pressure-resistant optical cell with modular optomechanical components and integrated electronics/firmware into a compact screw-in solution. This enables reproducible measurements directly at the process – with high resistance to pressure, temperature, and media – without requiring additional installation effort
In the KoSenDi research project, specific optical detectors were developed that achieve performance improvements and cost advantages through high application specificity. A partially transparent photodiode can measure the intensity of the excitation light directly in the optical path, and for fluorescence analysis, thin-film filter technology was integrated into a photodiode to suppress the excitation light
On 20th June 2026, the CiS Research Institute invited visitors to explore, participate, and marvel at interactive experiments and demonstrations as part of Ilmenau’s Science Night. Visitors of all ages were able to immerse themselves in the fascinating world of research and technology. We presented a diverse range of our silicon-based microsensors for visitors to learn about and try out
The successfully completed ZIM collaboration project ApproxiSens resulted in the development of a novel measurement system for hardness testers that raises industrial hardness measurement to a new level of quality. The newly developed measurement system for industrial hardness testing increases throughput in batch measurements by using precise control to achieve high speeds as the indenter approaches the test surface
At the 17th annual RUN Corporate Run, an 18-member team from the CiS Research Institute ran the five-kilometer course through Erfurt’s beautiful, historic old town for the first time. The team wore matching blue shirts emblazoned with the slogan “Micro-sensors, Macro-performance!”
