From 28 to 30 October 2019, employees of the CiS Research Institute will present the latest development results on optical microsystems, packaging and measuring technology in three of the sessions on offer
With the repeated participation as an exhibitor on the community stand of the Thuringian State Development Corporation, the CiS Research Institute could register consistently positive feedback in numerous discussions with interested parties from industry and medium-sized businesses
Piezoresistive pressure sensor chips from CiS are used where high precision, stability and reliability are required. The same sensor principle is now also used for force measurement in silicon strain gages. The strain-sensitive resistors are monolithically integrated into wafer-thin chips as Wheatstone measuring bridge
For precision force measurements, the CiS Research Institute has developed miniaturised silicon strain gauges (Si-DMS) with an integrated measuring bridge. The piezoresistive resistors are monolithically integrated in single-crystal silicon (K-factor = 80) and are available as a double strain element and as a full bridge
The SMARTER-SI project offers a novel manufacturing platform across Europe on which innovative and intelligent sensor components and microsystems can be produced cost-effectively in small and medium quantities. Around 5.3 million euros in funding will flow into the development and testing of this platform until 2018
Manufacturing technology and sensors are tested and characterized with a high level of metrological effort in order to be able to demonstrate the desired properties with long-term stability. Different measurement methods are required for this purpose. The new semiconductor complex measuring station represents a milestone in the characterization of technologies and sensors
Manufacturing technology and sensors are tested and characterized with a high level of metrological effort in order to be able to demonstrate the desired properties with long-term stability. Different measurement methods are required for this purpose. The new semiconductor complex measuring station represents a milestone in the characterization of technologies and sensors
Manufacturing technology and sensors are tested and characterized with a high level of metrological effort in order to be able to demonstrate the desired properties with long-term stability. Different measurement methods are required for this purpose. The new semiconductor complex measuring station represents a milestone in the characterization of technologies and sensors
A modular technology concept enables the efficient development of optical sensors with embedded light sources, micro-optics for beam shaping or steering, optical filters and an optimised detector array
The HotDru project is about the development of high-temperature pressure sensor systems suitable for series production with an operating temperature of up to 300°C. The newly developed pressure sensor chips are realised in different versions, all of which are based on the “Silicon on Insulator” (SOI) principle as a basic structure
Konrad-Zuse-Str. 14
99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
