MEMS – CiS

Silicon-based microsensors at SENSOR+TEST in Nuremberg

3. June 2026/in Events, MEMS, MOEMS

From 9th-11th June 2026, the CiS Research Institute will once again be exhibiting at the international gathering for sensor, measurement, and testing technology in Nuremberg. At SENSOR+TEST 2026, interested visitors can meet our experts again this year at Booth 501 in Hall 1 to discuss the latest research findings in silicon-based microsensor technology.
At the 23rd ITG/GMA Symposium “Sensors and Measurement Systems 2026,” the accompanying scientific conference at the Nuremberg Convention Center West (NCC West), the CiS Research Institute will be represented with four scientific presentations

Project Completion NH3-BZ: Photoacoustic Sensor for Hydrogen Production

6. May 2026/in Hydrogen, MEMS

The sensing cell is designed to determine the residual ammonia content in a dry N₂/H₂ gas mixture—a blend of nitrogen (N₂) and hydrogen (H₂) containing 75% hydrogen by volume—and is intended to enable real-time monitoring. The developed solution is based on innovative thermal emitters and operates without a chopper. Custom sensor elements can be quickly integrated

Technologies for the Future: CiS Research Institute at the 2026 Hannover Messe

20. April 2026/in Events, Medical technology, MEMS, MOEMS, Pressure

Over the next five days, our experts will be showcasing new project results and applications of silicon-based MEMS and MOEMS sensor concepts in Hall 13 at the LEG’s Thuringian joint booth (Booth E24) in Hanover

Stress-independent on-chip temperature sensing (SOT)

11. March 2026/in MEMS, Pressure

Silicon strain gauges (Si-SG) offer numerous outstanding properties. To reduce or compensate for the effects of temperature, temperature-sensing resistors, temperature diodes, and bipolar transistors were also integrated onto the same chip. The on-chip pnp transistors made it possible to implement temperature-compensated sensor configurations

Trade fair premiere at Germany’s leading trade fair for security and defense

19. February 2026/in Events, MEMS, MOEMS, Pressure

ENFORCE TAC, Germany’s leading trade fair for security and defense, will kick off in Nuremberg on 23rd February 2026. The CiS Research Institute will be represented for the first time with a stand in Hall 6, Stand 6-215, the joint stand of LEG Thüringen, showcasing relevant development results such as a mobile vital sensor system, customer-specific photodiode modules for laser warning systems, a retrofit kit for non-invasive pressure measurement, and sensors for belt tension monitoring

Presentation at the 21st “Trento” Workshop on Advanced Silicon Radiation Detectors

12. February 2026/in Events, MEMS, Quantum

From 17th-19th February 2026, the 21st “Trento” Workshop on Advanced Silicon Radiation Detectors will take place in Perugia, Italy. The CiS Research Institute will be represented there with a contribution on improving low gain avalanche detectors (LGAD) in terms of sensitivity to low-energy electrons

Project completion Nanolever: Sensor for determining layer stress

4. February 2026/in Force, MEMS

From materials research to software development: Discover STEM careers in a practical setting at the CiS Experiment Day

30. January 2026/in Events, MEMS, MOEMS

On 29th January 2026, around 40 students from the “Am Schwemmbach” cooperative comprehensive school in Erfurt visited the CiS Research Institute for Microsensor Technology to explore the world of scientific and technical professions

NivLer – a retrofittable solution for process pressure monitoring

28. January 2026/in Events, MEMS

In the completed NivLer project, the CiS Research Institute developed a non-invasive retrofit solution for monitoring pipe systems in industry. The retrofittable sensor supports data-based maintenance optimization through early detection of wear and tear and is also suitable for use in areas with high hygiene requirements, such as pharmaceutical and food production

VACOM receives Thuringia Innovation Award 2025 for miniaturized vacuum sensor CASSINI

19. December 2025/in Measurement, MEMS

VACOM wins the Thuringian Innovation Award 2025 and sets new technological standards with its new miniaturized vacuum sensor CASSINI. The scientific and technological basis for the microelectromechanical system (MEMS) was laid in joint research projects with the CiS Research Institute