During his tour at the Hannover Messe on April 20, 2023, Thuringia’s Minister of Economic Affairs Wolfgang Tiefensee learned about the current and future research and development activities of Thuringian exhibitors. At the joint stand of LEG Thüringen, the CiS Research Institute presented in particular technology results that are relevant for achieving climate protection goals. In a joint discussion with Thomas Brock, Managing Director of the CiS Research Institute, and Dr. Martin Schädel, Business Unit Manager MOEMS at the CiS Research Institute, Minister Tiefensee and Sabine Wosche, Managing Director of LEG Thüringen, discussed resource efficiency and energy saving. For this purpose, the Erfurt research institute showed special MEMS sensor chips that detect the concentration of hydrogen by means of palladium layers and can be used for the safety of transport networks. A direction-sensitive quadrant detector was also presented. The monolithic sensor determines the direction and strength of solar radiation and can support highly efficient daylighting and climate control. The basic concept is based on the integration of four photodiodes in the walls of a cavity in silicon. Depending on the design, the size of the entire sensor module can be less than 1 mm³.
