High-precision process measurement technology is facing new challenges with operating temperatures of up to 300°C. Plant and measurement technology producers want to use MEMS-based pressure transducer cores to open up functional extensions and new design spaces.
The CiS Research Institute in Erfurt has now developed the appropriate microsystem technologies for this purpose
The EU project SMARTER-SI aims to offer a novel manufacturing platform for microsystems throughout Europe, on which innovative and intelligent sensor systems can be produced cost-effectively in small and medium quantities. Special technologies for the production of mechanical and optical sensors made of silicon, in short MEMS and MOEMS, come from the CiS Research Institute
Quality assessment and process control are important tools in the production of high-quality products. In surface coating, it is necessary to determine essential properties of the applied coatings. This includes the layer thickness and the refractive index.
The compact sensor developed at the CiS Research Institute measures the polarization-dependent reflection of two different single-mode lasers at inclined angles of incidence
Dr Thomas Ortlepp takes over the newly created Chair of Sensor Technology and Energy Efficient Microelectronics at Yokohama National University in Japan
This important alliance creates for the first time a joint platform for the industry-related non-university research partners of SMEs
Dr. Gerrit Heinrich, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH, won the Young Researcher Award 2014 with his topic “Direct laser ablation of thin silicon nitride layers deposited on silicon by nonlinear absorption”
Laser light has special properties. Its beam can be guided narrowly over long distances and its spectrum is very pure. These properties are being harnessed for small sensors with micro laser illumination. The development goal is to make the length of the assembly smaller than the head of a pin (1.4 mm) and to guide the beam closer than the diameter of the pin (300 μm)
At the electronica and COMPAMED trade fairs, the CiS Research Institute will present the status of a current sensor development for determining the thickness and refractive indices of thin surface layers, the latter being closely dependent on the chemical and/or stoichiometric composition of the coating materials used
Manufacturing technology and sensors are tested and characterized with a high level of metrological effort in order to be able to demonstrate the desired properties with long-term stability. Different measurement methods are required for this purpose. The new semiconductor complex measuring station represents a milestone in the characterization of technologies and sensors
A mobile biofeedback system, which records the patient’s vital parameters measured in the external auditory canal, analyzes them with the help of a smartphone app and evaluates them individually, has been developed by the CiS Research Institute together with medical experts and industry partners
Konrad-Zuse-Str. 14
99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
