Thuringia’s industrial companies and research institutes are working together in the HIPS growth core to develop new high-performance sensors based on the already patented SiCer technology and to market them jointly in the future. SiCer technology stands for a unique combination of silicon technology (Si) with ceramic multilayer technology (Cer)
The CiS Research Institute uses its own piezoresistive, miniaturised silicon strain sensors (Si-DMS) with an integrated full bridge for hybrid force sensors. Glass solder bonding is used to join the Si strain gauges on the spring body at 90° to each other
Our employee Dr. Robert Täschner was awarded the Silicon Science Award for his dissertation “Process and sensor development for production-ready silicon-based pressure sensor systems suitable for high temperatures”. The CiS e.V. awards this prize for outstanding scientific achievements in the field of microsystems technology
With a new plasma-assisted etching process, a thin functional membrane and a break trench are simultaneously created for the following chip separation. In MEMS IR emitters, this results in more than a factor of 4 smaller areas and a dynamic range that is 2 times higher than that of the current state of the art
Permanently safe flanged joints are the basic requirements for stable production processes and work at a high safety level. Recently developed silicon-based MEMS sensors are applied to bolt heads and measure their deformation due to changes in the preload force
For the implementation of the National Hydrogen Strategy, the CiS Research Institute is partner in two research projects. The HYPOS consortium develops solutions for the entire value chain and broad application of green hydrogen in many industries
Passivation layers of synthetic diamond are particularly resistant to media. A cost-effective implementation of diamond coatings in relevant sensor areas has been reliably tested by adapting microsystem technologies
After a successful pitch at getstarted2gether, the founding project “Early Fault Detection in High-Performance Batteries” of DC Industrie Entwicklung GmbH is currently being further developed to production and process maturity. The CiS Research Institute supports the start-up during the funding period with its technical infrastructure as well as its competence in silicone from more than 25 years
Within this 1st status workshop on the BMBF growth core HIPS on March 19, Andrea Cyriax will present current developments in the field of MEMS sensor technology. In a second presentation, Dr. Klaus Ettrich will introduce the joint project on gas sensor technology, which is coordinated by the CiS Research Institute
In the chemical industry, for example in the production of battery cells, precise temperature measurement is required. Within the HotSens project, the CiS Forschungsinstitut succeeded in producing temperature diodes for the high temperature range up to a maximum of 300°C with a maximum of a one-point calibration
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E-Mail: info@cismst.de
