
Optical microsensors for measuring pulse contour and heart rate variability
/in Events, Medical technology, MOEMSCiS Research Institute presents multispectral photoplethysmography sensors for applications in pain therapy at SENSOR+TEST 2015.
A mobile biofeedback system that records vital parameters of the patient measured in the external auditory canal and processes them further with the help of a smartphone app.
Miniaturized silicon strain elements
/in Force, Medical technology, MEMS, PackagingFor precision force measurements in medical technology applications, the CiS Research Institute from Erfurt, Germany, has developed silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages
Micro laser illumination for analytics
/in Analytics, MOEMS, WaferprocessingThe CiS Research Institute is showing a micro-laser illumination for analytics at the Sensor+Test trade fair: Laser light has special properties. Its beam can be guided narrowly over long distances and its spectrum is very pure. These properties are made usable for small sensors with the micro-laser illumination
Piezoresistive high temperature pressure transducer cores
/in MEMS, Packaging, PressureHigh-precision process measurement technology is facing new challenges with operating temperatures of up to 300°C. Plant and measurement technology producers want to use MEMS-based pressure transducer cores to open up functional extensions and new design spaces.
The CiS Research Institute in Erfurt has now developed the appropriate microsystem technologies for this purpose
Thuringia participates in European network for the production of smart systems
/in MEMS, MOEMSThe EU project SMARTER-SI aims to offer a novel manufacturing platform for microsystems throughout Europe, on which innovative and intelligent sensor systems can be produced cost-effectively in small and medium quantities. Special technologies for the production of mechanical and optical sensors made of silicon, in short MEMS and MOEMS, come from the CiS Research Institute
Compact refractive index and film thickness sensor
/in Events, MOEMSQuality assessment and process control are important tools in the production of high-quality products. In surface coating, it is necessary to determine essential properties of the applied coatings. This includes the layer thickness and the refractive index.
The compact sensor developed at the CiS Research Institute measures the polarization-dependent reflection of two different single-mode lasers at inclined angles of incidence
Cooperation between CiS Forschungsinstitut GmbH and Yokohama National University in Japan
/in PersonnelDr Thomas Ortlepp takes over the newly created Chair of Sensor Technology and Energy Efficient Microelectronics at Yokohama National University in Japan
CiS Forschungsinstitut für Mikrosensorik GmbH founding member of the German industrial research association “Konrad-Zuse e.V.”
/in CiS generalThis important alliance creates for the first time a joint platform for the industry-related non-university research partners of SMEs
Young Researcher Award for Dr Gerrit Heinrich
/in PersonnelDr. Gerrit Heinrich, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH, won the Young Researcher Award 2014 with his topic “Direct laser ablation of thin silicon nitride layers deposited on silicon by nonlinear absorption”
Micro laser illumination for analytics
/in Analytics, Medical technology, MOEMSLaser light has special properties. Its beam can be guided narrowly over long distances and its spectrum is very pure. These properties are being harnessed for small sensors with micro laser illumination. The development goal is to make the length of the assembly smaller than the head of a pin (1.4 mm) and to guide the beam closer than the diameter of the pin (300 μm)