The CiS Research Institute is developing various miniaturized probes made of single-crystalline silicon with integrated piezoresistive measuring bridge for fast inline quality control of components made of a wide range of materials. High sampling rates are made possible by a very low probing force, a high natural frequency (3…5 kHz), and a very small mass (≈0.1 mg)
CiS Research Institute presents multispectral photoplethysmography sensors for applications in pain therapy at SENSOR+TEST 2015.
A mobile biofeedback system that records vital parameters of the patient measured in the external auditory canal and processes them further with the help of a smartphone app.
For precision force measurements in medical technology applications, the CiS Research Institute from Erfurt, Germany, has developed silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages
The CiS Research Institute is showing a micro-laser illumination for analytics at the Sensor+Test trade fair: Laser light has special properties. Its beam can be guided narrowly over long distances and its spectrum is very pure. These properties are made usable for small sensors with the micro-laser illumination
High-precision process measurement technology is facing new challenges with operating temperatures of up to 300°C. Plant and measurement technology producers want to use MEMS-based pressure transducer cores to open up functional extensions and new design spaces.
The CiS Research Institute in Erfurt has now developed the appropriate microsystem technologies for this purpose
The EU project SMARTER-SI aims to offer a novel manufacturing platform for microsystems throughout Europe, on which innovative and intelligent sensor systems can be produced cost-effectively in small and medium quantities. Special technologies for the production of mechanical and optical sensors made of silicon, in short MEMS and MOEMS, come from the CiS Research Institute
Quality assessment and process control are important tools in the production of high-quality products. In surface coating, it is necessary to determine essential properties of the applied coatings. This includes the layer thickness and the refractive index.
The compact sensor developed at the CiS Research Institute measures the polarization-dependent reflection of two different single-mode lasers at inclined angles of incidence
Dr Thomas Ortlepp takes over the newly created Chair of Sensor Technology and Energy Efficient Microelectronics at Yokohama National University in Japan
This important alliance creates for the first time a joint platform for the industry-related non-university research partners of SMEs
Dr. Gerrit Heinrich, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH, won the Young Researcher Award 2014 with his topic “Direct laser ablation of thin silicon nitride layers deposited on silicon by nonlinear absorption”
Konrad-Zuse-Str. 14
99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
