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Wafer technologies for micro laser illuminations

11. November 2015/in MOEMS, Waferprocessing

The CiS Research Institute has developed a cost-effective technology for the production of highly stable laser illuminators in a batch process. In this process, up to 20,000 of these modules are mounted on a glass wafer. The VCSEL-based laser modules are characterized by high beam quality

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https://www.cismst.de/wp-content/uploads/news-2015-11-11-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-11-11 10:39:002021-02-19 10:43:27Wafer technologies for micro laser illuminations

New sensor technologies for pulse contour analysis, determination of heart rate variability and measurement of blood flow in tissue

10. November 2015/in Medical technology, MOEMS, Packaging

CiS Research Institute introduces miniaturized silicon integrated multispectral photoplethysmography sensors. These are placed in the external auditory canal and are individually adapted to the patient

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https://www.cismst.de/wp-content/uploads/news-2015-11-10-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-11-10 10:20:002021-02-19 10:24:26New sensor technologies for pulse contour analysis, determination of heart rate variability and measurement of blood flow in tissue

Highly stable temperature diodes with single-point calibration for the temperature range up to 220°C

9. November 2015/in Silicon Detectors, Waferprocessing

At the CiS Research Institute, technological processes for silicon wafers have been developed, with which a reproducible sensitivity dU/dT, i.e. the slope of the voltage versus temperature, could be achieved

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https://www.cismst.de/wp-content/uploads/news-2015-11-09-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-11-09 09:55:002021-02-19 09:58:21Highly stable temperature diodes with single-point calibration for the temperature range up to 220°C

Long Night of Science at the CiS Research Institute

2. November 2015/in Events

For the 4th time, the research institute located in the southeast of the city of Erfurt participates in the Erfurt Science Night. On November 6, 2015, scientists and engineers will present their research results and applications

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https://www.cismst.de/wp-content/uploads/news-2015-11-02-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-11-02 10:05:002021-02-19 10:10:36Long Night of Science at the CiS Research Institute

Micro Laser Doppler Sensors for Blood Flow Measurements

15. May 2015/in Medical technology, MOEMS

The CiS Research Institute starts developments on a miniaturized optical sensor for investigations of blood flow velocity in the skin. The sensor principle is based on the laser Doppler method. Here, elastic scattering at the moving blood components causes a shift of the light wavelength, which becomes measurable by coherent superposition with the excitation light

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https://www.cismst.de/wp-content/uploads/news-2015-05-15-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-05-15 14:40:002021-02-22 10:09:02Micro Laser Doppler Sensors for Blood Flow Measurements

Customized piezoresistive micro scanners

14. May 2015/in Force, MEMS

The CiS Research Institute is developing various miniaturized probes made of single-crystalline silicon with integrated piezoresistive measuring bridge for fast inline quality control of components made of a wide range of materials. High sampling rates are made possible by a very low probing force, a high natural frequency (3…5 kHz), and a very small mass (≈0.1 mg)

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https://www.cismst.de/wp-content/uploads/news-2015-05-14-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-05-14 14:02:002021-02-19 14:09:36Customized piezoresistive micro scanners

Optical microsensors for measuring pulse contour and heart rate variability

13. May 2015/in Events, Medical technology, MOEMS

CiS Research Institute presents multispectral photoplethysmography sensors for applications in pain therapy at SENSOR+TEST 2015.
A mobile biofeedback system that records vital parameters of the patient measured in the external auditory canal and processes them further with the help of a smartphone app.

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https://www.cismst.de/wp-content/uploads/news-2015-05-13-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-05-13 13:30:002021-02-19 13:34:31Optical microsensors for measuring pulse contour and heart rate variability

Miniaturized silicon strain elements

12. May 2015/in Force, Medical technology, MEMS, Packaging

For precision force measurements in medical technology applications, the CiS Research Institute from Erfurt, Germany, has developed silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages

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https://www.cismst.de/wp-content/uploads/news-2015-05-12-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-05-12 11:37:002021-02-19 11:43:28Miniaturized silicon strain elements

Micro laser illumination for analytics

13. March 2015/in Analytics, MOEMS, Waferprocessing

The CiS Research Institute is showing a micro-laser illumination for analytics at the Sensor+Test trade fair: Laser light has special properties. Its beam can be guided narrowly over long distances and its spectrum is very pure. These properties are made usable for small sensors with the micro-laser illumination

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https://www.cismst.de/wp-content/uploads/news-2015-03-13-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-03-13 09:00:002021-02-22 09:52:45Micro laser illumination for analytics

Piezoresistive high temperature pressure transducer cores

12. March 2015/in MEMS, Packaging, Pressure

High-precision process measurement technology is facing new challenges with operating temperatures of up to 300°C. Plant and measurement technology producers want to use MEMS-based pressure transducer cores to open up functional extensions and new design spaces.
The CiS Research Institute in Erfurt has now developed the appropriate microsystem technologies for this purpose

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https://www.cismst.de/wp-content/uploads/news-2015-03-12-home.jpg 90 120 CiS https://www.cismst.de/wp-content/uploads/logo-trans.png CiS2015-03-12 15:04:002021-02-19 15:25:12Piezoresistive high temperature pressure transducer cores
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  • Debut at the Precision Fair in the Netherlands

    7. November 2025
  • Understanding quantum technologies – An introduction to the world of quantum

    6. November 2025
  • Project launch SOS – Stray light suppression in optical sensor assemblies

    29. October 2025
  • Four poster presentations at the MicroSystem Technology Congress 2025

    27. October 2025
  • CiS MOEMS Workshop: Key Technologies for Photonic Quantum Systems

    23. October 2025

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