High-precision process measurement technology is facing new challenges with operating temperatures of up to 300°C. Plant and measurement technology producers want to use MEMS-based pressure transducer cores to open up functional extensions and new design spaces.
The CiS Research Institute in Erfurt has now developed the appropriate microsystem technologies for this purpose
Manufacturing technology and sensors are tested and characterized with a high level of metrological effort in order to be able to demonstrate the desired properties with long-term stability. Different measurement methods are required for this purpose. The new semiconductor complex measuring station represents a milestone in the characterization of technologies and sensors
The HotDru project is about the development of high-temperature pressure sensor systems suitable for series production with an operating temperature of up to 300°C. The newly developed pressure sensor chips are realised in different versions, all of which are based on the “Silicon on Insulator” (SOI) principle as a basic structure
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Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
